Substrate Holder Power Contact Unit for Large Electrolytic Treatment
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Solution Overview
Problem
Existing substrate handling systems lack a secure and reliable method for handling and transporting large substrates through various processing stations, especially when combined with scanning systems.
Innovation Solution
A substrate holder with a substrate carrier and a power contact unit, featuring main and side legs, retaining elements, and electric contact portions, designed to securely hold and transport substrates during chemical and/or electrolytic surface treatments, ensuring stable contact and even current distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a substrate holder is designed to securely hold and transport large substrates through various processing stations, then the reliability of substrate handling is improved, but the device complexity increases due to the need for multiple retaining elements and power contact units
Solution Approach 1:
The substrate holder is divided into distinct functional segments: a substrate carrier with frame for mechanical support, a power contact unit with multiple legs for electrical contact, and retaining elements for positional stability. This segmentation allows each component to be optimized independently while working together to achieve reliable substrate handling through processing stations.
Solution Approach 2:
The substrate holder design integrates multiple functions into a single device: mechanical support through the frame, electrical contact through the power contact unit with main and side legs, and positional retention through retaining elements. This multi-functionality reduces the need for separate devices for each function, managing complexity while improving reliability.
2Reliability
If the power contact unit uses multiple main legs and side legs to contact the substrate, then the electrical contact stability is improved, but the manufacturing complexity increases
Solution Approach 1:
The power contact unit is segmented into main legs extending from the body and side legs arranged perpendicular to the main legs. This segmentation allows each leg to be independently positioned and adjusted, ensuring stable electrical contact with the substrate while enabling modular manufacturing approaches that can simplify production.
Solution Approach 2:
The retaining elements act as intermediaries between the power contact unit and the substrate carrier frame, providing a mechanism to maintain contact pressure and stability. This intermediary structure distributes mechanical stresses and facilitates assembly, potentially simplifying the overall manufacturing process while maintaining electrical contact stability.
3Reliability
If the substrate holder includes retaining elements between the power contact unit and frame, then the substrate contact stability is improved, but the device complexity increases
Solution Approach 1:
Retaining elements are introduced as intermediary components between the power contact unit and the substrate carrier frame. These elements serve as mechanical mediators that maintain the positional relationship and contact pressure between the power contact unit and substrate, improving contact stability while providing a modular approach that can simplify assembly and maintenance.
Solution Approach 2:
The retaining elements enable adjustment of mechanical parameters such as contact pressure and positional alignment between the power contact unit and substrate. By providing adjustable parameters, the system can optimize contact stability for different substrate types and processing conditions without requiring complete redesign of the entire device.
4Productivity
If the substrate holder is designed for continuous processing without unfastening or repositioning, then the productivity is improved, but the ease of operation decreases due to the complex holding mechanism
Solution Approach 1:
The substrate holder is designed as a multi-functional integrated system that combines mechanical holding, electrical contact, and positional retention in a single device. This allows the substrate to be loaded once and processed continuously through multiple stations without unfastening or repositioning, improving productivity. The standardized interface design maintains ease of operation by allowing straightforward substrate placement and removal.
Solution Approach 2:
The retaining elements and power contact unit are designed to automatically maintain contact with the substrate during processing without requiring manual adjustment. The mechanical design provides self-adjusting contact pressure and positional alignment, allowing the substrate holder to service itself during continuous processing operations, thereby improving productivity while maintaining operational simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The substrate holder provides accurate and efficient handling of substrates, ensuring stable contact and even current distribution during surface treatments, particularly for large substrates, and allows for continuous processing without the need for unfastening or repositioning.
Implementation Method 1
The substrate carrier may comprise a vacuum means for holding the frame thereon
Implementation Method 2
The power contact unit comprises a body, a plurality of main legs extending from the body at least partially along an edge of the substrate carrier and a plurality of side legs each arranged essentially perpendicular at one of the main legs to contact the substrate
Implementation Method 3
one or two HSPs together with one or two substrates are immersed into a tank containing an electrolyte and one or several anodes. Within this tank filled with electrolyte, the electrolyte (and with this the current distribution) is directed through the HSP plate(s) towards the substrate surface(s)
Data Source
AI summary
The disclosure relates to a substrate holder for holding a substrate in a chemical and/or electrolytic surface treatment of the substrate, a substrate handling system comprising a substrate holder and an immersion scanner unit and a use of a substrate holder for holding a substrate with a width in a range of 1000 to 3500 mm and a length in a range of 1000 to 4000 mm. The substrate holder for holding a substrate in a chemical and/or electrolytic surface treatment of the substrate comprises a substrate carrier and a power contact unit. The substrate carrier comprises a frame to carry the substrate. The power contact unit comprises a body, a plurality of main legs extending from the body at least partially along an edge of the substrate carrier and a plurality of side legs each arranged essentially perpendicular at one of the main legs to contact the substrate. The power contact unit further comprises a plurality of retaining elements provided between the body of the power contact unit and the frame of the substrate carrier to keep the substrate in contact with the power contact unit when the substrate is placed onto the substrate carrier.