Substrate Holder Reception Apparatus Alignment
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Solution Overview
Problem
Existing electrochemical treatment apparatuses face challenges in achieving precise alignment between the anode and substrate due to the wear caused by high contact pressures during electrical contact, which affects the quality of electrochemical treatments, especially when trying to reduce the distance between the anode and substrate for more intense material deposition.
Innovation Solution
A substrate holder reception apparatus with separate alignment and contact devices, where the alignment device protrudes further than the contact device, allowing for precise mechanical alignment before electrical contact is made, reducing wear and enabling a shorter anode-substrate distance for more intense material deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high contact pressure is applied during electrical contact of substrate holder, then reliable electrical contact is achieved, but wear increases affecting alignment precision
Solution Approach 1:
The substrate holder connection device is segmented into two distinct functional components: a substrate holder alignment device for mechanical alignment and a substrate holder contact device for electrical contact. This segmentation allows the alignment function to be separated from the high-contact-pressure electrical contact function, preventing wear at the alignment interface while maintaining reliable electrical contact through the dedicated contact device.
Solution Approach 2:
The alignment device protrudes further than the contact device, enabling preliminary mechanical alignment of the substrate holder before electrical contact is established. This preliminary action ensures precise alignment is achieved first, and only then does the high-contact-pressure electrical contact occur, protecting the alignment precision from wear during subsequent operations.
2Productivity
If distance between anode and substrate is reduced for more intense material deposition, then treatment intensity increases, but alignment precision requirements increase
Solution Approach 1:
By segmenting the connection device into separate alignment and contact functions, the system achieves high alignment precision that enables reduced anode-substrate distance. The dedicated alignment device ensures the substrate surface is precisely parallel to the anode, allowing intensive material deposition without compromising uniformity even at smaller distances.
3Manufacturing precision
If separate alignment and contact devices are used, then alignment precision improves and wear is reduced, but device complexity increases
Solution Approach 1:
While maintaining functional separation between alignment and contact devices, both components are integrated into a single substrate holder connection device that interfaces with one substrate holder. This merging approach achieves the precision benefits of separation without the complexity of completely independent systems, as both functions share the same mechanical interface and control mechanism.
Data Source
AI summary
This invention concerns a substrate holder reception apparatus (1) for clamping a substrate holder (11) in a substrate holder clamping direction (SHCD) in a predetermined position of the substrate holder (11) and releasing the substrate holder (11), comprising at least one substrate holder connection device (21) for mechanical aligning and electrically contacting of the substrate holder (11), wherein the substrate holder connection device (21) comprises a separate substrate holder alignment device (211) for aligning the substrate holder (11) with the substrate holder connection device (21) in an alignment direction, and a separate substrate holder contact device (212) for electrically contacting the substrate holder (11). Further, the invention concerns an electrochemical treatment apparatus (5) comprising the substrate holder reception apparatus (1).