Substrate Holder Replacement Timing Control
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Solution Overview
Problem
In substrate processing apparatuses, the replacement of substrate holders is time-consuming and reduces operating efficiency due to the need for stopping the device, cooling, and performing adjustments, which prolongs the boat replacement period and lowers production efficiency.
Innovation Solution
A method and apparatus for determining the optimal timing for replacing substrate holders by monitoring the cumulative film thickness on the holders and simultaneously replacing both holders when one reaches the threshold, thereby reducing downtime and improving efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single substrate holder is replaced when it reaches the replacement timing, then the substrate processing can continue with the other holder, but the replacement operation must be performed separately for each holder, increasing the total replacement time
Solution Approach 1:
The patent merges the replacement operations of multiple substrate holders by determining a common replacement timing based on the cumulative film thickness of all holders. When the calculation result indicates that replacement timing has arrived for one or more holders, all eligible holders are replaced simultaneously in a single maintenance operation, thereby reducing the total time loss compared to sequential replacements.
2Reliability
If the substrate holder is replaced frequently to prevent film deposition, then the film peeling issue is avoided, but the replacement operation becomes more frequent, reducing device operating rate
Solution Approach 1:
The patent changes the replacement decision parameter from fixed-time or individual-holder-based replacement to a cumulative film thickness-based replacement system. By calculating the cumulative film thickness for each substrate holder and comparing it against a threshold, the system determines the optimal replacement timing that prevents film peeling while maximizing the device operating rate through extended holder usage periods.
3Ease of repair
If maintenance operations are performed on individual substrate holders separately, then each holder can be maintained at its optimal timing, but the total maintenance time and device downtime increase
Solution Approach 1:
The patent performs preliminary calculation of cumulative film thickness for all substrate holders before executing replacement operations. This preliminary assessment allows the system to identify when replacement timing arrives for one or multiple holders and plan a unified replacement operation, thereby reducing total maintenance time while maintaining optimal holder condition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for shorter boat replacement periods, reducing downtime and improving production efficiency by enabling simultaneous replacement of substrate holders, thus enhancing the operating rate of the substrate processing apparatus.
Implementation Method 1
When the substrates mounted to the boat are subjected to a film forming process, films are deposited on the boat as well as the substrates
Data Source
AI summary
A maintenance method of a substrate processing apparatus includes a first processing step of carrying a first substrate holder holding a substrate into a process chamber and processing the substrate held by the first substrate holder within the process chamber, a second processing step of carrying a second substrate holder holding a substrate into the process chamber and processing the substrate held by the second substrate holder within the process chamber, a determination step of determining a replacement timing of the first substrate holder and the second substrate holder, and a maintenance step of, at the replacement timing determined at the determination step, replacing the first substrate holder and the second substrate holder respectively with a third substrate holder and a fourth substrate holder, if at least one of the first substrate holder and the second substrate holder reaches the replacement timing.