Substrate Holder Seal Integration for Electroplating Maintenance
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Solution Overview
Problem
Conventional substrate holders for electroplating require complex maintenance procedures, particularly for replacing seal members, due to the need for multiple fastening tools, which complicates the process and increases downtime.
Innovation Solution
A substrate holder design where the inner and outer seal members are fixed to a single fixing ring, reducing the number of fastening tools required and simplifying the maintenance process by using a groove and sealing protrusions for secure contact, allowing for easier replacement and reduced part complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple fixing rings and numerous bolts are used to secure seal members, then sealing reliability is improved, but maintenance complexity and time increase
Solution Approach 1:
The patent combines multiple fixing rings into a single integrated fixing ring structure. The seal members are secured to this single fixing ring using fewer bolts, merging what were previously separate fastening components into one unified assembly that maintains sealing reliability while simplifying maintenance operations.
Solution Approach 2:
The single fixing ring serves multiple functions: it secures both the inner seal member and the outer seal member, provides a unified mounting structure, and enables simplified replacement procedures. This multi-functional component replaces the need for multiple specialized fixing rings and numerous bolts.
2Reliability
If multiple bolts are used to secure seal members, then sealing reliability is improved, but maintenance time increases
Solution Approach 1:
By merging multiple bolted connections into a single fixing ring assembly with fewer bolts, the patent reduces the number of fastening operations required during seal member replacement, directly reducing maintenance time while preserving sealing integrity through the unified fixing structure.
3Reliability
If multiple fixing rings are used, then sealing reliability is improved, but device complexity increases
Solution Approach 1:
The patent merges multiple separate fixing rings into one integrated fixing ring structure, reducing the total number of components and simplifying the overall device architecture while maintaining the necessary sealing functions through the unified design.
Data Source
AI summary
A substrate holder includes a fixed holding member and a movable holding member for detachably holding a substrate by gripping a peripheral portion of the substrate therebetween, and an inner seal member and an outer seal member which are fixed to the movable holding member. When the substrate is held by the movable holding member and the fixed holding member, the inner and outer seal members seal the connection between the movable holding member and a peripheral portion of the substrate and the connection between the movable holding member and the fixed holding member, respectively. The movable holding member includes a seal holder, and the inner seal member and the outer seal member are fixed between the seal holder and a fixing ring secured to the seal holder.