Substrate Holder Segmentation for Independent Plating Current Control
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Solution Overview
Problem
Existing substrate jigs for electroplating face challenges in managing increased numbers of contacts and electric current paths as substrate size grows, leading to potential thickness issues, particularly when plating both surfaces of a substrate.
Innovation Solution
A substrate holder system with independent first and second holding members, each with dedicated external connection contacts and wiring paths, allowing for separate exposure and connection of both surfaces of the substrate without increasing the overall thickness, enabling independent control of electric current distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the number of contacts and electric current paths is increased to accommodate larger substrate size, then the substrate holder thickness increases, but this is undesirable for maintaining compact design
Solution Approach 1:
The substrate holder is divided into a first holding member and a second holding member, each with independent external connection contacts and electric current paths. This segmentation allows the system to handle multiple contacts for larger substrates while maintaining a compact overall thickness, as each member can be optimized independently rather than requiring a single thick structure to accommodate all contacts.
2Manufacturing precision
If independent electric current paths are provided for each surface, then control precision over plating specifications is improved, but device complexity increases
Solution Approach 1:
The electric current supply system is segmented into independent paths for the first surface and second surface, with each path controlled through separate external connection contacts. This allows precise independent control of plating specifications for each surface while managing complexity through modular design where each holding member is a self-contained unit.
Solution Approach 2:
Each holding member is designed to be multi-functional, serving both as a mechanical support structure and as an electric current conduction path. The first holding member provides both structural support for the first surface and independent electric current supply through its external connection contacts, eliminating the need for separate control mechanisms and reducing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures efficient electric current supply to both surfaces of the substrate, maintains a reduced substrate holder thickness, and allows for independent control of plating specifications on each surface, effectively addressing the challenges of increased substrate size and contact numbers.
Implementation Method 1
the first holding member has at least one first external connection contact, and the second holding member has at least one second external connection contact, which is independent of the first external connection contact
Data Source
AI summary
There is provided a substrate holder for holding a substrate including a first holding member having a first opening portion for exposing a first surface of the substrate, and a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate, wherein the first holding member has at least one first external connection contact, and the second holding member has at least one second external connection contact that is independent of the first external connection contact.