Substrate Holder Terminal Reduction via Parallel Heating Resistors
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Solution Overview
Problem
Conventional ceramic heaters require twice the number of terminals as heating resistors, leading to increased space requirements and potential heat generation issues due to higher resistance values between electrodes and terminals.
Innovation Solution
A substrate holder design with a ceramic base member embedding multiple electrodes, conductive members, connecting parts, and terminals, where the resistance between connecting parts and terminals is lower than between electrode ends, and the number of terminals is reduced by using lands to overlap with terminals and conductive members, thereby minimizing heat generation and space usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If two terminals are connected to each heating resistor to supply electric power, then the heating resistor can be properly powered, but the number of terminals becomes two times the number of heating resistors, increasing space requirements
Solution Approach 1:
The patent merges the functions of multiple terminals by having multiple heating resistors share common power supply terminals. Specifically, multiple heating resistors are connected in parallel between a common power supply terminal and ground, reducing the total number of terminals required from 2n (where n is the number of heating resistors) to just 2 terminals for the entire array of heating resistors.
Solution Approach 2:
The patent implements multi-functionality by designing terminals that serve multiple heating resistors simultaneously. The power supply terminal and ground terminal are universally connected to multiple heating resistors, allowing each terminal to perform the same function (power supply or grounding) for multiple different heating resistors, thereby reducing the overall terminal count.
2Reliability
If multiple terminals are used to supply power to heating resistors, then each heating resistor can be independently powered, but the resistance value between terminals and heating resistors increases, causing heat generation issues
Solution Approach 1:
The patent combines multiple heating resistors into parallel circuits sharing common terminals, which reduces the total resistance between the power supply terminal and the heating resistor array. The equivalent resistance of parallel connections is lower than individual resistances, thereby reducing heat generation according to P=I²R while maintaining independent controllability of each heating resistor through individual control wiring.
3Area of stationary object
If the number of terminals is reduced, then space requirements decrease, but the resistance value between connecting parts and terminals must be kept small to prevent heat generation
Solution Approach 1:
The patent merges multiple heating resistor connections into parallel circuits with common terminals, which inherently reduces the resistance in connecting parts. By connecting multiple heating resistors in parallel between common terminals, the equivalent resistance is reduced, allowing for compact terminal arrangement while minimizing heat generation in the connecting parts through the lower resistance path.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design reduces the number of terminals needed, minimizes heat generation by lowering resistance values, and allows for more compact terminal arrangement while maintaining efficient power supply to electrodes.
Implementation Method 1
A resistance value between a connecting part, of the plurality of connecting parts, connected to the at least one conductive member, and a terminal, of the plurality of terminals, connected to the at least one conductive member is smaller than a resistance value between both ends of each of the plurality of electrodes
Implementation Method 2
there is known a ceramic heater in which two heat elements (heating resistors) corresponding, respectively, two different heating areas are embedded or buried
Data Source
AI summary
There is provided a substrate holder including: a ceramic base member; electrodes embedded in the ceramic base member; at least one conductive member embedded in the ceramic base member; connecting parts each of which has an end electrically connected to one of the electrodes; a land electrically connected to the at least one conductive member; and terminals each of which has an end connected to one of the electrodes, the at least one conductive member or the land. A resistance value between a connecting part, included in the connecting parts and connected to the at least one conductive member, and a terminal, included in the terminals and connected to the at least one conductive member is smaller than a resistance value between both ends of each of the electrodes; and the number of the terminals is smaller than two times the number of the electrodes.