Substrate Holder Transfer Orientation for Throughput
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Solution Overview
Problem
The existing substrate processing apparatuses face a reduction in throughput due to the need to wait for the transfer of one substrate holder to complete before another can be inserted or removed from the processing bath, as they are typically oriented vertically, causing obstruction and inefficiency.
Innovation Solution
A substrate processing apparatus and method where the substrate holder is transferred and processed with its surface initially horizontal, allowing for simultaneous transfer and processing without obstruction, using a grasping section to orient the substrate holder horizontally for transfer and vertically for processing, and a lifting mechanism to support and position the holder within the bath.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the substrate holder is transferred vertically above the processing bath, then the substrate can be processed with the surface vertically oriented, but another substrate holder becomes an obstacle and transfer must be awaited, reducing throughput
Solution Approach 1:
The substrate holder is transferred horizontally instead of vertically above the processing bath. By changing the transfer direction from vertical to horizontal, the substrate holder moves in a different dimension that avoids intersecting with other vertically oriented substrate holders, eliminating the obstacle problem and allowing continuous operation without waiting for transfers to complete.
Solution Approach 2:
The patent introduces asymmetric orientation where substrate holders are transferred horizontally while maintaining vertical orientation during processing. This asymmetric approach allows the transfer path to be separated from the processing space, enabling simultaneous operations without interference between transfer and processing activities.
2Productivity
If the substrate holder is transferred horizontally with surface horizontally oriented, then transfer can occur simultaneously with processing without obstruction, but the substrate surface must be reoriented vertically for processing
Solution Approach 1:
The substrate holder is designed with dynamic orientation capability, allowing it to be rotated between horizontal transfer position and vertical processing position. This dynamic adjustment enables the same substrate holder to accommodate both transfer and processing requirements, resolving the contradiction between simplified transfer and processing orientation needs.
Solution Approach 2:
The substrate holder serves multiple functions: it acts as both a transfer carrier during horizontal movement and a processing fixture during vertical orientation. This multi-functionality eliminates the need for separate transfer and processing mechanisms, maintaining simplicity while achieving simultaneous operations.
Data Source
AI summary
A substrate processing apparatus comprises a transferring device including a grasping section configured to grasp a substrate holder, and a transferring section configured to transfer the substrate holder grasped by the grasping section, and a processing bath for storing a substrate held by the substrate holder so that a surface of the substrate is vertically oriented, and processing the substrate. The grasping section is configured to grasp the substrate holder with a surface of the substrate oriented horizontally. The transferring section is configured to transfer the substrate holder above the processing bath, with the surface of the substrate oriented horizontally.