Substrate Holder Geometry for Precise Vertical Wafer Transfer
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Solution Overview
Problem
Existing substrate transfer devices struggle to efficiently transfer substrates held in a vertical posture due to limitations in arm design and holding mechanisms, which can lead to misalignment and increased processing time.
Innovation Solution
A substrate holder with a main body featuring first and second arms, each with a holding guide, allows for secure peripheral holding of substrates. The arms and holding guides are positioned diametrically outside the substrate on the same plane, enabling efficient transfer and alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the substrate is held by the holding guides at the leading ends of the arms, then the substrate can be securely held during transfer, but the arms and holding guides may interfere with other devices or operations in the processing system
Solution Approach 1:
The patent positions the arms and holding guides in a specific spatial arrangement where they extend radially outward from the substrate center. The holding guides are positioned at leading ends of arms that rotate about the substrate center, placing components in different dimensional zones to avoid interference with processing devices that operate in other radial or axial spaces.
Solution Approach 2:
The arms are designed with asymmetric geometry where the holding guides are positioned offset from the arm centers toward the leading ends. This asymmetric arrangement allows the holding function to be separated spatially from the rotation axis, enabling secure substrate holding while minimizing interference with centrally located processing equipment.
2Manufacturing precision
If the arms are positioned to hold the substrate periphery, then precise alignment can be achieved, but the transfer device complexity increases
Solution Approach 1:
The substrate holding function is segmented into multiple independent arms, each with its own holding guide. This segmentation allows each arm to be independently positioned and adjusted to achieve precise alignment, while the modular structure actually reduces overall complexity compared to a monolithic holding mechanism.
Solution Approach 2:
The arms serve multiple functions: they provide structural support for the holding guides, enable rotational movement for substrate access, and maintain precise positioning through their geometric relationship to the substrate center. This multi-functionality reduces the need for additional separate alignment mechanisms.
Data Source
AI summary
A substrate holder includes a main body having a first arm and a second arm whose leading ends are spaced apart from each other and whose base ends are connected to each other; a first holding guide fixed to the leading end of the first arm, and configured to hold a periphery of the substrate; and a second holding guide fixed to the leading end of the second arm, and configured to hold the periphery of the substrate. A length between the first holding guide and the second holding guide is shorter than a diameter of the substrate. In a state that the substrate is located closer to the base ends than a position where the substrate is held by the first holding guide and the second holding guide, the first arm, the second arm, the first holding guide and the second holding guide are located diametrically outside the substrate.