Interchangeable Substrate Holding Device Segmentation
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Solution Overview
Problem
Existing holding devices for substrates in treatment systems are often limited in their ability to accommodate different substrate types and sizes, requiring extensive renovation and downtime when switching between substrates, and they typically reduce the usable treatment area.
Innovation Solution
A holding device with standardizable components and interfaces that allow for the use of interchangeable carriers and segments, enabling the device to adapt to various substrate geometries and sizes, with a flange and segment structure that can be adjusted to accommodate different forces and substrate shapes, allowing for automatic handling and efficient use of the treatment area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If holding devices are designed for specific substrate types and sizes, then substrate handling precision is improved, but adaptability to different substrate types deteriorates
Solution Approach 1:
The holding device is divided into a flange component and multiple interchangeable segment components. Each segment can be independently attached or detached from the flange, allowing the device to be reconfigured for different substrate types without redesigning the entire holding device. This segmentation enables both precision handling for specific substrates and adaptability to various substrate geometries.
Solution Approach 2:
The flange component serves as a universal base that can accommodate multiple types of segments designed for different substrate configurations. This multi-functional design allows a single holding device to handle various substrate types (circular, rectangular, different sizes) by simply changing the segment attachments, thereby achieving both precision and versatility.
2Adaptability or versatility
If holding devices are designed to accommodate different substrate types, then adaptability is improved, but device complexity increases
Solution Approach 1:
By segmenting the holding device into standardized flange and segment components with uniform attachment interfaces, the complexity is distributed and managed through modularity. Each segment is designed for a specific substrate type, but all segments interface with the same flange, reducing overall system complexity compared to designing entirely different holding devices for each substrate type.
Solution Approach 2:
The holding device employs dynamic reconfigurability through easily attachable and detachable segment components. This allows the device structure to adapt its configuration based on the substrate type being processed, transforming from a static complex structure to a dynamically adjustable one, thereby reducing operational complexity.
3Adaptability or versatility
If holding devices are modified for different substrate types, then substrate handling capability is improved, but system downtime increases
Solution Approach 1:
The interchangeable segment design allows rapid switching between substrate types by simply detaching one segment and attaching another to the flange, eliminating the need for extensive reconfiguration. This significantly reduces system downtime compared to traditional modification approaches.
Solution Approach 2:
Multiple segment components can be pre-configured for different substrate types and kept ready for quick exchange. This preliminary preparation enables immediate switching between substrate types without time-consuming on-site modifications, thereby minimizing system downtime.
4Area of stationary object
If holding devices are designed for minimal substrate surface coverage, then treatment area utilization is improved, but substrate support stability may deteriorate
Solution Approach 1:
Each segment component is designed with localized support features specifically optimized for its intended substrate type. The support structure provides minimal coverage only where necessary for stable holding, leaving the rest of the substrate surface exposed for treatment. This local optimization maintains both treatment area utilization and holding stability.
Solution Approach 2:
The segment components are pre-designed and pre-configured with appropriate support structures, clamping mechanisms, and positioning features tailored to specific substrate types. This preliminary design ensures that each segment provides optimal stability for its intended substrate while maintaining minimal coverage, eliminating the need for post-assembly adjustments.
Data Source
Figure 1~2
Figure 3~4
Figure 5a~5b
AI summary
The invention relates to a holding device 1 for receiving several substrates 61, which are to be treated in a treatment plant provided for this purpose. The invention also relates to such a treatment plant and a treatment method, both of which use an embodiment of the holding device described below. The holding device 1 comprises a flange 10 and at least one segment 20, which is arranged on the flange 10. The flange 10 has connecting surfaces for attaching the segment 20 to the flange 10, wherein the segment 20 has a segment support structure 30 and at least one carrier 40 for receiving one or more substrates 61, which is mounted on the segment support structure 30. (Fig. 1)