Substrate Holding Device Groove Support Protrusions
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Solution Overview
Problem
Existing substrate holding devices experience downward bending of the base body and substrate at positions above grooves due to inadequate support, leading to potential profile irregularities and processing issues.
Innovation Solution
A substrate holding device with a base body featuring gas holes on the upper surface, a groove on the lower surface connected to the gas holes, and downward protrusions within the groove, which provides additional support from the stage at both the lower surface and the protrusions, reducing bending and profile irregularities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a groove is formed in the base body for vacuum suction, then substrate holding capability is improved, but downward bending of the base body and substrate occurs at the groove position
Solution Approach 1:
The patent applies local quality by forming protrusions specifically within the groove region to provide localized support. The protrusions are positioned only where needed (in the groove area) to prevent bending, while the rest of the base body maintains its original structure for vacuum suction functionality. This localized structural modification resolves the contradiction by strengthening only the vulnerable area without affecting the overall holding capability.
2Ease of manufacture
If the base body is supported only at the lower surface, then manufacturing simplicity is maintained, but insufficient support causes bending and profile irregularities
Solution Approach 1:
The patent applies segmentation by dividing the support function into multiple contact points. Instead of a single continuous support surface, the base body is equipped with protrusions that create discrete support points within the groove region. These segmented support points are sufficient to prevent bending while maintaining manufacturing simplicity, as the protrusions can be formed through straightforward processes like molding or machining.
Data Source
AI summary
A substrate holding device includes a base body that has a flat plate-like shape and in which gas holes that open in an upper surface of the base body are formed, and a plurality of protrusions that protrude upward from the upper surface of the base body. A groove that opens in a lower surface of the base body and that is connected to the gas holes is formed in the base body, and a plurality of protrusions that protrude downward are formed in the groove.