Substrate Holding Device with Magnetic and Vacuum Decoupling
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Solution Overview
Problem
Conventional substrate carriers cause mechanical stress and inefficient coating processes due to mechanical fixing methods, leading to substrate damage and reduced processing capacity when coating both sides of substrates.
Innovation Solution
Mechanical and geometrical decoupling between the substrate carrier and substrate placement regions, using holding frames to securely hold substrates with adaptable tolerances, allowing for precise positioning and masking on both sides, reducing mechanical stress and enabling flexible use with various substrate types.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If mechanical fixing methods are used to hold substrates on substrate carriers, then substrates can be securely held during transport and processing, but mechanical stress is generated that can damage substrates and cause deformations
Solution Approach 1:
The patent replaces mechanical fixing methods with a magnetic field-based holding system. Magnets embedded in the substrate carrier generate magnetic fields that attract and hold ferromagnetic substrates without mechanical contact, eliminating mechanical stress and deformation while maintaining secure holding during transport and processing
Solution Approach 2:
The patent uses vacuum (negative pressure) fields to hold substrates against the carrier surface. By creating a vacuum environment or applying vacuum pressure through ports, the system secures substrates without mechanical contact, preventing mechanical stress while ensuring reliable holding
2Productivity
If substrate carriers are designed to hold multiple substrates for coating both sides, then processing capacity should increase, but the complexity of the carrier design and operation increases
Solution Approach 1:
The patent divides the substrate carrier into multiple independent holding zones or pockets, each capable of holding and processing individual substrates. This segmentation allows simultaneous processing of multiple substrates on different sides while maintaining simple, modular design elements that can be independently controlled and managed
Solution Approach 2:
The patent designs the substrate carrier to perform multiple functions: holding substrates, providing magnetic or vacuum-based securing, enabling rotation or repositioning for dual-sided coating, and facilitating easy loading/unloading. This multi-functionality increases processing capacity while avoiding the need for multiple separate devices
3Ease of operation
If conventional substrate carriers are used with loose substrate placement, then substrates can be easily loaded and unloaded, but substrates can easily fall out during ventilation or transport
Solution Approach 1:
The patent replaces mechanical clamping or covering mechanisms with magnetic or vacuum fields that automatically secure substrates upon placement. Substrates are easily loaded by simply placing them on the carrier, where they are immediately held secure by magnetic attraction or vacuum pressure, eliminating the need for complex mechanical retention systems while preventing substrate drop-out during transport or ventilation
Data Source
AI summary
In accordance with various embodiments, provision is made of a substrate holding device, wherein the latter may comprise a carrier plate with a recess, the recess extending from an upper side of the carrier plate to a lower side of the carrier plate through the carrier plate, a holding frame, which has a frame opening and a support area, surrounding the frame opening, for holding a substrate in the recess, wherein the holding frame inserted into the recess lies on the carrier plate in sections.