Substrate Holding Module with Movable Cover for Flexible Robot Access

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Solution Overview

Problem

Conventional substrate processing apparatuses face limitations in substrate handling due to the restricted approach path of transfer robots caused by the fixed opening in temporary placing tables, leading to increased complexity and size, which hinders efficient substrate transfer and processing.

Innovation Solution

A substrate holding module with a pedestal, cover, and moving mechanism that allows for flexible access and rotation, along with a holding mechanism using pins and liquid supply and drainage systems, enabling efficient substrate handling and processing without the constraints of a fixed opening.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a fixed opening is provided in the housing of the temporary placing table, then substrate loading/unloading is enabled, but the approach path of the transfer robot is limited to a certain direction

Engineering Contradiction:

Improvesubstrate loading/unloadingVSAvoidrobot approach direction

Core Design Contradiction:

Ease of operationVSAdaptability or versatility

Solution Approach 1:

The patent applies the dynamics principle by replacing the fixed opening with a movable shutter mechanism. The shutter can be opened or closed as needed, allowing the temporary placing table to adapt to different robot approach directions while maintaining substrate loading/unloading functionality. This dynamic structure resolves the contradiction between operational ease and adaptability.

Inventive Principle:

Principle #15Dynamics

2Adaptability or versatility

If multiple openings are provided for substrate loading/unloading, then robot access flexibility is improved, but the structure becomes complicated and size increases

Engineering Contradiction:

Improverobot access flexibilityVSAvoidstructure complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies the universality principle by designing a single opening equipped with a movable shutter that can be opened in different directions or at different times. This single multi-functional opening replaces the need for multiple dedicated openings, achieving robot access flexibility while keeping the structure simple and compact.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Ease of operation

If a shutter is provided to open/close the opening, then substrate access control is improved, but the structure becomes more complex

Engineering Contradiction:

Improvesubstrate access controlVSAvoidstructure complexity

Core Design Contradiction:

Ease of operationVSDevice complexity

Solution Approach 1:

The patent applies the merging principle by integrating the shutter mechanism directly into the housing structure of the temporary placing table. The shutter is designed as an inherent part of the housing rather than a separate component, allowing substrate access control while minimizing additional structural complexity.

Inventive Principle:

Principle #5Merging (Combining)

Data Source

PatentUS10593570B2Substrate holding module, substrate processing apparatus, and substrate processing method

Publication Date: 2020.03.17 EBARA CORP

AI summary

According to the present disclosure, there is provided a substrate holding module that is capable of accommodating a substrate transferred by a transfer robot. The substrate holding module includes a pedestal including a holding mechanism configured to hold the substrate, a cover configured to cover the pedestal, and a moving mechanism configured to move the cover away from the pedestal.