Substrate Holding Device Positioning via Rotational Drive
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Solution Overview
Problem
Existing substrate positioning methods in semiconductor manufacturing are inefficient due to space constraints, increased costs, and operational reliability issues, particularly in CMP processes where precise alignment is crucial but challenging with existing alignment pin and slope-based methods.
Innovation Solution
A substrate holding device with a movable stage and positioning pins that use a rotational drive mechanism to position the substrate accurately without additional motive power sources, utilizing a pin stage that engages and disengages to ensure precise center alignment with the substrate stage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If alignment pins are driven to move the substrate toward the center of the stage, then positioning precision is improved, but device complexity and cost increase due to requiring additional motive power sources
Solution Approach 1:
The patent makes the substrate stage serve multiple functions: it acts as both the driving source and the positioning reference. By enabling the stage to rotate and move the positioning pins simultaneously, the system eliminates the need for separate motive power sources, thereby reducing device complexity while maintaining positioning precision.
Solution Approach 2:
The patent combines the driving function and positioning function into a single integrated mechanism. The substrate stage's rotation drives the positioning pins to move radially inward, merging what would traditionally be separate functions performed by separate components, thus reducing overall system complexity.
2Manufacturing precision
If guides with slope are provided around the substrate periphery to slide the substrate under gravity, then positioning is achieved, but operational reliability deteriorates due to space constraints and potential sliding failures
Solution Approach 1:
Instead of using passive gravitational sliding as in conventional methods, the patent inverts the approach by using active rotational driving. The substrate stage rotation positively drives the positioning pins to move the substrate to the center, eliminating reliability issues associated with passive sliding mechanisms.
Solution Approach 2:
The substrate stage performs its own positioning function by using its rotation to drive the positioning pins. This self-service mechanism eliminates the need for external positioning mechanisms, improving reliability by reducing the number of components that could fail.
3Manufacturing precision
If a motive power source such as a motor is added for positioning, then positioning precision is improved, but device complexity and cost increase due to additional installation space requirements
Solution Approach 1:
The substrate stage is designed to perform multiple functions including rotation, positioning, and driving the positioning pins. This multi-functionality eliminates the need for additional motors and their associated installation space, thereby maintaining positioning precision without increasing the footprint.
Solution Approach 2:
The patent merges the positioning drive function into the substrate stage's rotation mechanism. By combining what would be separate functions (rotation and positioning drive) into one integrated mechanism, the system avoids the need for additional motive power sources and their installation space.
Data Source
AI summary
There is provided a device and method for accurately positioning a substrate on a stage by a simple method using power of a movement mechanism provided for a movable stage. A substrate holding device for holding a substrate is provided. The substrate holding device includes a substrate stage for supporting the substrate, a stage drive mechanism for causing the substrate stage to move, positioning pin for positioning the substrate on the substrate stage, first urging members each urging the positioning pin, and a stopper member capable of applying a force against the urging member to the positioning pin. The positioning pin is configured to move together with the substrate stage by the stage drive mechanism. The positioning pin moving together with the substrate stage allows the substrate to be positioned on the substrate stage.