Substrate Holding Device Side Surface Positioning
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Solution Overview
Problem
Existing substrate holding devices face challenges in maintaining holding accuracy, especially when using weak suction forces, leading to complications in subsequent processes due to the lack of positioning mechanisms.
Innovation Solution
A substrate holding device is designed with a suctioning member for front or back surface suction, a position determiner that contacts the side surface of the substrate, and a driver to position the substrate accurately, enhancing holding accuracy without damaging the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the substrate is suctioned with weak force to avoid damaging the front surface, then the substrate surface is protected, but the holding accuracy drops
Solution Approach 1:
The substrate holding device is divided into two functional parts: a suctioning member for holding the substrate and a positioning mechanism for ensuring accuracy. The positioning mechanism includes a positioning member that contacts the side surface of the substrate, separating the holding function from the positioning function, allowing weak suction to protect the surface while the positioning mechanism maintains accuracy
Solution Approach 2:
A positioning mechanism acts as an intermediary between the suctioning member and the substrate. The positioning member contacts the side surface of the substrate to provide positioning, while the suctioning member holds the substrate through suction. This intermediary positioning mechanism enables the use of weak suction force without compromising holding accuracy
2Device complexity
If no positioning mechanism is included to simplify the device structure, then the device complexity is reduced, but the holding accuracy drops
Solution Approach 1:
The device is segmented into essential components: suctioning member and positioning mechanism. This segmentation allows the device to maintain simplicity by including only necessary elements while achieving both simplification and improved holding accuracy through the targeted addition of the positioning mechanism
Solution Approach 2:
The positioning mechanism is applied locally at the side surface of the substrate rather than throughout the entire device. This localized positioning approach improves holding accuracy without requiring complex mechanisms across the entire device structure, maintaining overall simplicity while achieving precision where needed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution improves positioning accuracy during substrate transfer and mounting, simplifying subsequent processes by ensuring precise handling and reducing the complexity of positioning mechanisms.
Implementation Method 1
a suctioning member capable of suctioning and holding a front surface or a back surface of a substrate
Data Source
AI summary
Provided is a substrate holding device that inhibits drop in holding accuracy of a substrate. A Bernoulli chucking pad suctions and holds a front surface or a back surface of a substrate S. A position determiner 54 is capable of pushing the substrate S in contact with a side surface 82 of the substrate S, and positioning the suctioned substrate S. A pin 66 enables the position determiner 54 to come in contact with the side surface 82 of the substrate S. The pin 66 brings the position determiner 54 into contact with the side surface 82 of the substrate S, and the position determiner 54 thereby positions the substrate S.