Substrate Housing Container Sealing Member Design
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Solution Overview
Problem
Existing substrate housing containers fail to maintain a pressurized state for an extended period and suppress humidity rise effectively, leading to gas permeation issues when housing semiconductor wafers and similar substrates.
Innovation Solution
A substrate housing container design featuring a sealing member with a base part, a deformable base part-side deformation part, a container contact tip part with a greater thickness in the oscillating direction, and a protruding part, made of fluororubber, which allows for airtight sealing by oscillating relative to the base part, reducing gas permeation and maintaining a pressurized state.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional sealing member is used to block the container body opening, then the container can be sealed, but the pressurized state cannot be maintained for an extended period and humidity rises
Solution Approach 1:
The patent changes the physical parameters of the sealing member by using fluororubber material and optimizing the thickness distribution (thicker at the container contact tip part, thinner at the base part-side deformation part). This parameter optimization enables the sealing member to maintain effective sealing contact while reducing gas permeation, thereby maintaining the pressurized state for extended periods.
Solution Approach 2:
The patent employs fluororubber as the sealing member material, which is a composite material known for its excellent chemical resistance, low gas permeation properties, and flexibility. This material choice directly addresses the problem of gas permeation and enables long-term maintenance of the pressurized state while maintaining reliable sealing performance.
2Reliability
If the sealing member is made thicker to improve sealing, then sealing performance improves, but gas permeation increases and pressurized state cannot be maintained
Solution Approach 1:
The patent applies local quality by creating a non-uniform thickness distribution in the sealing member. The container contact tip part (which contacts the opening peripheral edge section) is made thicker to ensure reliable sealing contact, while the base part-side deformation part is made thinner to reduce the overall gas permeation path. This localized thickness optimization resolves the contradiction between sealing performance and gas permeation reduction.
Solution Approach 2:
The patent optimizes the thickness parameter of the sealing member by using fluororubber material with inherently low gas permeation properties and designing a variable thickness profile. This parameter change enables the sealing member to provide effective sealing while minimizing gas permeation, allowing the pressurized state to be maintained for extended periods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The container effectively maintains a pressurized state for a longer duration and suppresses humidity rise, ensuring the integrity of the substrates by minimizing gas permeation through the use of a fluororubber sealing member with a specific design that enhances sealing efficiency.
Implementation Method 1
a base part-side deformation part that couples the base part and the container contact tip part and is elastically deformable to allow the container contact tip part to oscillate relative to the base part
Implementation Method 2
blocking the container body opening in an airtight state with the lid body by being interposed between the opening peripheral edge section and the lid body and in contact in close contact with the opening peripheral edge section
Data Source
AI summary
A sealing member of this substrate housing container has: a base part-side deformation part that couples the base part and the container contact tip part and is elastically deformable to allow the container contact tip part to oscillate relative to the base part; and a protruding part that is present in the portion of the container contact tip part connected to the base part-side deformation part and that protrudes from the outer surface of the container contact tip part. The thickness of the container contact tip part in the oscillating direction of the container contact tip part is configured to be greater than the thickness of the base part-side deformation part.