Substrate Processing Housing Mist Spray for Contaminant Control
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Solution Overview
Problem
Existing substrate processing apparatuses face issues with the adhesion of contaminants inside the housing, leading to scattering of processing waste and liquid, which can cause operational inefficiencies and maintenance challenges.
Innovation Solution
The substrate processing apparatus incorporates a substrate holder, driving mechanism, housing with a sprayer that sprays liquid in mist form, and an exhaust device to suppress contaminant adhesion, along with a spindle cover design to manage airflow and a cleaning liquid nozzle for efficient waste management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional substrate processing apparatus is used, then substrate processing can be performed, but contaminants adhere inside the housing causing operational inefficiencies and maintenance challenges
Solution Approach 1:
The sprayer is activated before substrate processing begins to spray liquid in mist form throughout the housing interior. This preliminary action creates a protective liquid layer on surfaces before contaminants can adhere, preventing the contamination problem before it occurs during substrate processing operations
Solution Approach 2:
A liquid substance is introduced as an intermediary between the housing surfaces and contaminants. The sprayer disperses this liquid as mist that settles on internal surfaces, creating a barrier that prevents contaminants from directly adhering to the housing, thereby solving the contaminant adhesion problem
2Object-generated harmful factors
If the housing interior is sprayed with liquid to suppress contaminant adhesion, then contaminant adhesion is reduced, but liquid and processing waste must be managed and removed
Solution Approach 1:
The exhaust device is integrated to perform multiple functions simultaneously: it exhausts excess liquid mist from the housing interior, captures processing waste generated during substrate processing, and maintains negative pressure throughout the system. This merging of functions manages both the liquid from spraying and processing waste through a single coordinated system
Solution Approach 2:
The exhaust device utilizes pneumatic principles by creating negative pressure within the housing to control fluid dynamics. This negative pressure environment causes liquid mist to be drawn toward exhaust openings and prevents contaminants from adhering to surfaces, while also directing processing waste toward collection points for removal
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces contaminant adhesion, maintains operational efficiency, and minimizes maintenance by ensuring even distribution and removal of processing waste and liquid within the housing.
Implementation Method 1
a sprayer configured to spray a liquid to an inside of the housing in a form of mist
Data Source
AI summary
A substrate processing apparatus includes a substrate holder for holding a substrate; a driving mechanism for driving a tool for processing the substrate held by the substrate holder; a housing that accommodates the substrate holder and the tool; and a sprayer for spraying a liquid to an inside of the housing in a form of mist.