Substrate Processing Image Display for Faster Result Comparison
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Solution Overview
Problem
Existing display systems for substrate processing apparatuses require users to confirm multiple images in different devices to understand the processing state of substrates, making it cumbersome and time-consuming to grasp the complete processing results.
Innovation Solution
A display device that integrates the capability to display two types of images with different capturing timings or regions on a single screen, allowing simultaneous display of still images of the entire substrate surface and its peripheral edge, along with optional moving images and measurement data, enhancing understanding of the processing state.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If multiple images are displayed in separate devices, then each image can be clearly displayed, but the user needs to confirm multiple images in different devices which is cumbersome and time-consuming
Solution Approach 1:
The patent combines multiple image display functions into a single display device. The display unit simultaneously presents a first image showing the entire substrate surface and a second image showing a specific region of the substrate, allowing users to view multiple processing states in one location rather than switching between multiple devices.
Solution Approach 2:
The patent segments the display content into different regions within a single display device. The display unit divides the screen to show a first image of the entire substrate and a second image of a specific region simultaneously, enabling comprehensive viewing without requiring multiple separate devices.
2Ease of operation
If multiple images are displayed on a single screen, then the user can easily compare processing states, but the device complexity increases
Solution Approach 1:
The display device is designed with multi-functionality, where a single display unit performs multiple functions: displaying the entire substrate image, displaying specific region images, and allowing switching between different viewing modes. This universal design reduces the need for multiple specialized devices while maintaining operational simplicity.
3Measurement precision
If detailed images of specific regions are captured, then processing quality can be monitored, but the capturing region becomes limited and excludes other areas
Solution Approach 1:
The patent adds a spatial dimension to the display by showing both a comprehensive view (first image of entire substrate) and a detailed view (second image of specific region) simultaneously on the same display device. This multi-scale presentation allows users to monitor both overall processing status and specific quality details without sacrificing coverage.
Data Source
AI summary
A display device for displaying information about substrate processing executed in a substrate processing apparatus, includes: a display control part configured to, in response to a first instruction from a user, allow the display screen to display a first image based on first capturing data obtained by capturing an image of a display target substrate among the substrates in the substrate processing apparatus, and configured to, in response to a second instruction from the user, allow the display screen to display a second image based on second capturing data obtained by capturing the image of the display target substrate in the substrate processing apparatus, wherein the first capturing data is obtained by capturing the image of the display target substrate at a different timing from the second capturing data, or by capturing the image of the display target substrate in a different capturing region from the second capturing data.