Substrate Treatment Image Synchronization for Real-Time Abnormality Detection
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Solution Overview
Problem
Current substrate treating apparatuses fail to accurately detect abnormalities in real-time during operations due to differences in imaging conditions and inability to synchronize design and operational images, leading to potential improper treatments.
Innovation Solution
A substrate treating apparatus that includes a recipe memory unit, an imaging unit, a normal image memory unit, and an abnormality detecting unit, which synchronizes real-time images with pre-simulated normal images based on three-dimensional design information to detect abnormalities accurately, ensuring consistent imaging conditions and enabling real-time abnormality detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If normal video data is stored in advance for abnormality detection, then abnormality detection capability is improved, but detection accuracy deteriorates when imaging conditions differ from stored data
Solution Approach 1:
The patent applies preliminary action by simulating and storing normal images in advance under various imaging conditions before actual operation. The normal image memory unit pre-stores reference images that correspond to different imaging conditions, so when detection is needed, the appropriate pre-stored image can be selected without being limited by the imaging conditions during actual operation. This resolves the contradiction by preparing multiple pre-stored images for different conditions rather than relying on a single set of normal video data.
Solution Approach 2:
The patent applies parameter changes by varying imaging conditions (such as imaging position, imaging timing, and imaging angle) when capturing real images during operation. The system adjusts these parameters to match the conditions under which normal images were stored, or selects appropriate pre-stored normal images that correspond to the current imaging parameters. This dynamic adjustment of imaging parameters enables accurate abnormality detection even when imaging conditions differ from the original stored data.
2Loss of information
If video images are captured and stored for later analysis, then abnormality investigation capability is improved, but real-time abnormality detection capability deteriorates
Solution Approach 1:
The patent applies feedback by implementing real-time abnormality detection through continuous comparison of captured images with pre-stored normal images during operation. The abnormality detecting unit immediately compares the real image with the corresponding normal image and outputs detection results without delay. This real-time feedback mechanism enables immediate abnormality detection while operation is ongoing, rather than waiting for post-operation analysis, thus resolving the contradiction between investigation capability and real-time detection capability.
3Reliability
If imaging is performed during operation to detect abnormalities, then real-time detection capability is improved, but imaging condition variability causes detection accuracy to deteriorate
Solution Approach 1:
The patent applies preliminary action by pre-storing normal images under multiple different imaging conditions (different positions, timings, and angles) before operation begins. When real-time detection is performed, the system selects the appropriate pre-stored normal image that corresponds to the current imaging conditions, or captures a real image at specific predetermined timings that match the pre-stored conditions. This preparation of multiple reference images for various conditions eliminates the accuracy deterioration caused by imaging condition variability.
Solution Approach 2:
The patent applies dynamics by making the imaging timing and conditions adjustable and adaptable during operation. The imaging unit captures real images at predetermined timings that correspond to the operation timing of the component, and the abnormality detecting unit dynamically selects or compares images based on matching imaging conditions. This dynamic adjustment of imaging timing and condition matching enables accurate real-time detection despite variations in operational conditions.
Data Source
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AI summary
Disclosed is a substrate treating apparatus for performing a predetermined treatment on a substrate. The apparatus includes: a recipe memory unit configured to store a recipe; an imaging unit provided at a predetermined location and configured to image the component as a real image at work; a normal image memory unit configured to simulate a condition in advance where the component normally operates in response to the recipe and store in advance a normal image at this time in a view from the location in accordance with three-dimensional design information of the substrate treating apparatus; an operation controller configured to cause the predetermined treatment to be performed; and an abnormality detecting unit configured to detect an abnormality in accordance with a difference between the normal image synchronized with operation of the recipe and the real image.