Substrate Chamber Imaging for Adaptive Monitoring Load Control
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Solution Overview
Problem
Existing substrate processing methods struggle with inefficient monitoring of multiple targets due to inconsistent image data conditions, leading to excessive processing load and inaccurate monitoring of shape, position, and state changes of processing liquids.
Innovation Solution
A substrate processing method that adjusts image conditions such as resolution and frame rate based on specific monitoring targets, including separate settings for object shape and position, processing liquid state changes, and abnormality detection, using a camera to acquire and process image data accordingly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If image data is acquired in a wide visual field range at a high resolution and a high frame rate, then the monitoring coverage and detail quality are improved, but the data amount becomes unnecessarily large and the processing load becomes unnecessarily large
Solution Approach 1:
The patent applies local quality by setting different image conditions (resolution, frame rate, visual field range) according to different monitoring targets and processing stages. For example, during substrate movement, a lower frame rate is used, while during liquid ejection, a higher frame rate is applied. This resolves the contradiction by optimizing image quality locally for each monitoring need rather than using uniformly high settings throughout.
Solution Approach 2:
The patent implements dynamics by dynamically adjusting image conditions based on the current processing stage and monitoring target. The control unit changes resolution, frame rate, and visual field range in real-time according to what needs to be monitored at each moment, thereby reducing processing load while maintaining necessary monitoring accuracy.
2Productivity
If image data is acquired with optimized conditions for specific monitoring targets, then the processing load is reduced, but the monitoring accuracy for different targets may be compromised
Solution Approach 1:
The patent ensures monitoring accuracy is maintained by applying appropriate image conditions locally for each monitoring target. The control unit determines suitable resolution, frame rate, and visual field range for each specific target (substrate position, liquid ejection, abnormality detection), ensuring each gets the optimal image quality needed without unnecessarily high settings for all targets.
Solution Approach 2:
The patent uses preliminary action by pre-setting multiple types of image conditions corresponding to different monitoring scenarios. The control unit selects from these pre-prepared conditions based on the current monitoring target, ensuring accurate monitoring is ready and available without real-time computation overhead.
3Device complexity
If a single image condition is used for all monitoring targets, then the device complexity is reduced, but the adaptability to different monitoring requirements deteriorates
Solution Approach 1:
The patent applies universality by using a single control unit that handles multiple monitoring functions with different image conditions. The control unit universally manages substrate position monitoring, liquid ejection monitoring, and abnormality detection, adapting its settings for each function rather than requiring separate dedicated systems for each monitoring task.
Solution Approach 2:
The patent implements parameter changes by modifying image conditions (resolution, frame rate, visual field range) according to different monitoring requirements. The control unit changes these parameters dynamically to adapt to various monitoring targets, maintaining versatility without increasing fundamental device complexity.
Data Source
AI summary
A substrate processing method includes: a holding step of carrying a substrate into an inside of a chamber and holding said substrate; a supply step of supplying a fluid to the substrate on the inside of the chamber; an imaging step of sequentially imaging the inside of the chamber by a camera to acquire image data; a condition setting step of specifying a monitoring target and changing an image condition based on the monitoring target; and a monitoring step of performing a monitoring process on the monitoring target based on the image data having the image condition corresponding to the monitoring target.