Substrate Treatment Imaging for Nozzle Abnormality Detection
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Solution Overview
Problem
Current substrate treating apparatuses face challenges in accurately detecting abnormalities due to environmental changes, light source variations, and the presence of water droplets or fumes, leading to incorrect positional information and false detection of nozzle or component abnormalities.
Innovation Solution
A substrate treating apparatus that utilizes a design information memory unit to store three-dimensional design information, an imaging unit to capture real images, and a matching processing unit to determine the coincidence of feature points between real and design shapes, allowing for accurate abnormality detection by comparing reality information with normal information based on three-dimensional design data, even in the presence of environmental differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Difficulty of detecting and measuring
If image-based nozzle position detection is used, then visual monitoring capability is improved, but measurement precision deteriorates due to environmental changes, light source variations, and water droplets/fumes
Solution Approach 1:
The patent creates a two-dimensional design shape as a precise copy of the three-dimensional nozzle structure. This digital model serves as a reference template that can be compared against captured images without being affected by environmental conditions, light variations, or contamination in the treatment chamber.
Solution Approach 2:
The patent transforms the three-dimensional nozzle design information into a two-dimensional design shape that corresponds to the imaging plane. This dimensional transformation allows direct comparison between the design model and captured images, enabling accurate position detection despite environmental interference.
2Manufacturing precision
If three-dimensional design information is used for matching, then manufacturing precision is improved, but device complexity increases due to additional processing units and data structures
Solution Approach 1:
The patent extracts only the essential two-dimensional projection of the three-dimensional nozzle design that is needed for image matching. By taking out only the relevant geometric features and creating a simplified two-dimensional design shape, the system reduces computational complexity while maintaining detection accuracy.
Solution Approach 2:
The patent segments the complex three-dimensional design information into manageable components, creating a two-dimensional design shape that focuses only on the critical features visible in the imaging plane. This segmentation simplifies the matching process by comparing only essential geometric characteristics.
Data Source
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AI summary
Disclosed is a substrate treating apparatus for performing a predetermined treatment on a substrate. The apparatus includes a design information memory unit configured to store three-dimensional design information, an imaging unit configured to capture a real image containing the target components, a matching processing unit configured to determine which of the target components matches a real image shape as a two-dimensional shape in the real image captured by the imaging unit in accordance with a degree of coincidence of feature points between the real image shape and a two-dimensional design shape based on three-dimensional design information about the target components, and an abnormality detecting unit configured to detect an abnormality of the target component through comparison between the reality information about the matched target component based on the real image and the normal information based on the three-dimensional design information when the target component is normal.