Substrate Transfer Imaging Correction for Warpage and Zig-Zag Motion
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Solution Overview
Problem
Existing substrate transfer systems face challenges in capturing precise images of substrates due to warpage and movement errors during transfer, leading to blurred images and difficulties in detecting film thickness and discharge marks accurately.
Innovation Solution
A substrate transfer system equipped with a lower line camera and an upper line camera in the transfer path to capture images of the rear and front surfaces, respectively, with a controller that generates corrected images by detecting and adjusting for the tilt and zig-zag movement of the substrate holder, allowing for precise detection of film thickness and discharge marks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a substrate is transferred using a substrate holder, then the substrate can be moved between processing chambers, but warpage and movement errors occur during transfer causing blurred images
Solution Approach 1:
The system captures images of the substrate and substrate holder during transfer, detects positional deviations and warpage, and uses this feedback information to correct image distortion. The lower line camera captures rear surface images and holder images, while the upper line camera captures front surface images, providing comprehensive feedback for precision correction.
Solution Approach 2:
The invention creates corrected images by processing the captured images to compensate for warpage and movement errors. The controller generates accurate representations of the substrate surfaces despite physical distortions during transfer, effectively creating a corrected copy that reflects the true substrate state.
2Productivity
If images are captured during substrate transfer, then inspection can be performed, but movement errors cause blurred images making detection difficult
Solution Approach 1:
The system uses the captured images as feedback to detect actual substrate positions and orientations during transfer, then corrects these images to achieve clear, accurate representations suitable for precise detection of film thickness and discharge marks.
Solution Approach 2:
The controller applies parameter changes to the captured images through image processing techniques, adjusting for positional deviations, rotational errors, and warpage to transform blurred images into sharp, detectable images without requiring slower transfer speeds.
3Adaptability or versatility
If the substrate holder tilts or moves in a zig-zag pattern, then transfer flexibility is maintained, but image accuracy deteriorates
Solution Approach 1:
The system creates corrected copies of the captured images by computationally removing the effects of tilt and zig-zag movement. The controller processes the raw images to generate accurate representations that reflect the true substrate features despite transfer path deviations.
Solution Approach 2:
The invention replaces mechanical precision requirements with computational correction. Instead of requiring perfectly stable mechanical transfer, the system uses image processing algorithms to substitute for the mechanical stability that would otherwise be needed to maintain image accuracy.
Data Source
AI summary
A substrate transfer system includes: a transfer device provided with a substrate holder configured to hold a substrate; a lower line camera provided in a transfer path of the substrate to capture an image of a rear surface of the substrate which is being transferred and an image of the substrate holder; an upper line camera provided in the transfer path of the substrate to capture an image of a front surface of the substrate which is being transferred; and a controller that generates a rear-surface image based on the image captured by the lower line camera and generates a front-surface image based on the image captured by the upper line camera.