Substrate Processing Input Validation and Error Detection

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Solution Overview

Problem

Existing substrate processing systems fail to accurately detect input errors, leading to unintended processing and potential product failures due to incorrect set values.

Innovation Solution

A substrate processing system with an input receiving unit, a determination unit that checks set values against the substrate processing apparatus' characteristics, and a warning output unit to alert users of invalid inputs, utilizing statistical information from previous set values to validate input accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a substrate processing apparatus operates according to user-input set values, then the apparatus can execute various processing operations, but incorrect set values may cause unintended processing and product failures

Engineering Contradiction:

Improveprocessing operation flexibilityVSAvoidprocessing accuracy

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The system performs preliminary validation of set values against apparatus characteristics before executing processing operations. The determination unit checks whether input set values fall within valid ranges defined by the apparatus characteristics, preventing incorrect values from causing unintended processing while still allowing versatile operation within safe parameters.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system establishes a feedback loop where the determination unit continuously validates user-input set values against stored apparatus characteristics. When invalid values are detected, the system provides feedback to prevent execution, thereby maintaining reliability without restricting legitimate processing versatility.

Inventive Principle:

Principle #23Feedback

2Reliability

If an input prohibiting device is used to prevent incorrect set values, then unintended processing is reduced, but the device only prohibits values equal to or less than a lower limit set value in a predetermined step

Engineering Contradiction:

Improveerror preventionVSAvoidinput flexibility

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

The system changes from a simple threshold-based prohibition approach to a comprehensive parameter validation approach. The determination unit evaluates set values against multiple apparatus characteristics including upper and lower limits, valid ranges, and step relationships across multiple processing steps, providing more accurate error prevention without unnecessarily restricting valid inputs.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The determination unit serves multiple functions: it validates individual set values against upper and lower limits, checks step relationships between multiple parameters, and prevents unintended processing across various processing steps. This multi-functional validation mechanism provides comprehensive error prevention while maintaining input flexibility for all valid configurations.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS10545478B2Substrate processing system, control device, group controller, and host computer

Publication Date: 2020.01.28 TOKYO ELECTRON LTD

AI summary

Disclosed is a substrate processing system including a substrate processing apparatus configured to execute a predetermined processing on a substrate accommodated in a processing container, an input receiving unit configured to receive an input of a set value for executing the predetermined processing, and a determination unit configured to determine whether or not the set value received by the input receiving unit is valid based on the set value received by the input receiving unit and a characteristic of the substrate processing apparatus.