Substrate Processing Device Component Inspection via Color Analysis
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Solution Overview
Problem
Conventional substrate processing devices face challenges in timely detection of component degradation, leading to decreased device operation ratios and increased costs due to the need for collective component replacement, even when some components remain in good condition.
Innovation Solution
A substrate processing device equipped with inspection means that captures image data to determine component degradation based on color information, allowing for prompt detection and response to component degradation without requiring device operation for inspection, using RGB color values to set determination standards for each component type and usage condition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional inspection methods using actual substrates are performed, then component degradation can be detected, but device operation ratio decreases due to dedicated inspection operations
Solution Approach 1:
The patent replaces the mechanical inspection method (using actual substrates to physically interact with components) with an optical inspection system that uses imaging devices to capture images of components. This substitution eliminates the need for dedicated inspection operations while maintaining degradation detection capability, thereby resolving the contradiction between reliability and productivity.
Solution Approach 2:
The patent creates visual copies (images) of the actual components using imaging devices. Instead of using real substrates for inspection, the system captures images of components and analyzes them for degradation signs. This copying approach allows inspection without actual device operation, maintaining both detection accuracy and operational efficiency.
2Ease of manufacture
If components are replaced collectively based on average usage time, then maintenance simplicity is improved, but costs increase due to replacement of components still in good condition
Solution Approach 1:
The patent performs preliminary inspection of each component's actual condition through image analysis before replacement decisions are made. By detecting degradation at individual component level in advance, the system identifies which components truly need replacement, preventing unnecessary replacement of still-functional components and reducing overall replacement costs.
Solution Approach 2:
The patent transitions from uniform maintenance approach (collective replacement based on average usage) to localized maintenance (individual component assessment). Each component is evaluated based on its specific degradation state captured in images, allowing differentiated replacement decisions that optimize both maintenance simplicity and cost efficiency.
3Reliability
If resin coating is applied to metal components, then corrosion prevention is improved, but particle generation and metal contamination occur due to coating degradation over time
Solution Approach 1:
The patent performs preliminary detection of coating degradation through image analysis before severe particle generation occurs. By monitoring visual changes in the coating (discoloration, peeling, cracking) in advance, the system can schedule maintenance proactively, preventing the coating from degrading to a point where significant particle contamination occurs.
Data Source
AI summary
A substrate processing device according to the present invention is a substrate processing device that performs substrate processing with a processing solution and includes inspection means for inspecting degradation of components constituting the substrate processing device. The inspection means includes: capturing means for acquiring image data of the components; color information acquisition means for acquiring color information of an inspection target component from the image data acquired by the capturing means; and degradation determination means for determining a degradation degree of the inspection target component based on the acquired color information.