Substrate Inspection Apparatus Using Grid Pattern Light for Foreign Substance Detection
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Solution Overview
Problem
Conventional substrate inspection methods fail to accurately detect foreign substances due to discrepancies between displayed and real images, making it difficult and time-consuming to identify issues on substrates, especially when the displayed images do not reflect the actual substrate features like stencils and holes.
Innovation Solution
An apparatus that projects grid pattern light and color lights onto the substrate, captures images using infrared lighting, and processes them to obtain 3D and 2D image information, combining detection results to accurately identify foreign substances while excluding unnecessary regions using mask information.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a conventional shape measuring apparatus displays only a portion such as a pad region using gerber data, then the inspection process can be simplified, but the displayed image does not match the real substrate image, making it difficult to catch the real position and requiring too much time
Solution Approach 1:
The patent creates a master image that is a true copy of the actual substrate appearance, including all features like stencils and holes. This master image serves as a reference that accurately represents the real substrate, allowing operators to easily locate and inspect specific regions without time-consuming searches, thus resolving the contradiction between inspection simplicity and position identification time
Solution Approach 2:
The patent performs preliminary actions by capturing the complete substrate image first and creating a master image before the actual inspection process. This pre-captured master image contains all substrate features and is prepared in advance, enabling rapid navigation and inspection during the actual process without needing to search for positions in real-time
2Ease of operation
If a conventional shape measuring apparatus uses displayed images for inspection, then the inspection can be performed, but foreign substances on the substrate cannot be detected since the displayed image is not a real image
Solution Approach 1:
The patent creates a master image that is a true optical copy of the actual substrate, capturing all physical features including foreign substances. This real image copy allows the inspection system to detect foreign substances by comparing the captured images with the master image, thereby achieving both ease of operation and high detection precision
Solution Approach 2:
The patent utilizes color information from the captured images to identify foreign substances. By capturing images with color data and comparing them with the master image, the system can detect foreign substances based on color differences, enhancing the precision of foreign substance detection while maintaining ease of operation
3Measurement precision
If multiple detection methods are used to detect foreign substances, then detection accuracy can be improved, but the device complexity increases
Solution Approach 1:
The patent merges multiple detection approaches by combining the captured substrate images with the master image in a unified comparison process. The image processing unit integrates the information from captured images and the master image to detect foreign substances, achieving high detection accuracy without requiring separate complex detection systems for each method
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise and reliable detection of foreign substances by enhancing the accuracy of image representation and improving the reliability of detection by comparing captured images with reference images, reducing errors and improving detection speed.
Implementation Method 1
a projecting part configured to provide at least one grid pattern light onto the substrate
Implementation Method 2
a lighting part configured to provide a plurality of color lights onto the substrate; an image capturing part configured to capture at least one image of the substrate and a foreign substance on the substrate by receiving the grid pattern light and the color lights reflected by the foreign substance and the substrate
Implementation Method 3
an infrared lighting to provide infrared light onto the substrate
Data Source
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AI summary
In order to inspect a substrate, an image information of a substrate before applying solder is displayed. Then, at least one inspection region on the substrate is image-captured to obtain an image of the inspection region that is image-captured. Then, image information that is to be displayed is renewed and the renewed image information is displayed. And, in order to inspect a foreign substance, obtained image of the inspection region is compared with a reference image of the substrate. Therefore, an operator can easily catch a region corresponding to a specific region of the image that is displayed, and easily detect a foreign substance on the substrate.