Substrate Inspection Unit for Verified Deep-Learning Labels

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Solution Overview

Problem

In the deep learning process for substrate inspection during printing, unclear classification criteria and incorrectly labeled image data sets lead to reduced learning degree and prediction performance, particularly in the production of display devices like LCD and LED panels.

Innovation Solution

A substrate inspecting unit with modules for feature extraction, validity evaluation, class verification, and data reconstruction using pre-trained models and unsupervised learning techniques like t-SNE and DBSCAN to improve classification accuracy and reduce labeling work time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of time

If manual labeling of image data is performed without verification, then labeling work time is reduced, but classification accuracy and prediction performance deteriorate

Engineering Contradiction:
Improvelabeling work timeVSAvoidclassification accuracy
Core Design Contradiction:
Loss of timeVSMeasurement precision

Solution Approach 1:

The system performs preliminary verification of training image data using unsupervised learning algorithms (t-SNE for dimensionality reduction, DBSCAN for clustering) before the deep learning training process. This preliminary action identifies and corrects mislabeled data, ensuring high classification accuracy while maintaining efficient labeling workflows.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system implements a feedback mechanism where the deep learning model's prediction results are used to verify and refine the training data labels. The model processes training data, and the results feed back into the labeling verification process, allowing automatic correction of mislabeled images and continuous improvement of classification accuracy.

Inventive Principle:
Principle #23Feedback

2Productivity

If deep learning training is performed with unverified image data, then training speed is improved, but prediction performance deteriorates

Engineering Contradiction:
Improvetraining speedVSAvoidprediction performance
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The system performs preliminary verification of training image data using unsupervised learning algorithms (t-SNE for dimensionality reduction, DBSCAN for clustering) before the deep learning training process. This preliminary action identifies and corrects mislabeled data, ensuring high classification accuracy while maintaining efficient labeling workflows.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system implements a feedback mechanism where the deep learning model's prediction results are used to verify and refine the training data labels. The model processes training data, and the results feed back into the labeling verification process, allowing automatic correction of mislabeled images and continuous improvement of classification accuracy.

Inventive Principle:
Principle #23Feedback

3Device complexity

If classification criteria are not clearly defined, then data processing simplicity is improved, but learning degree and verification reliability drop

Engineering Contradiction:
Improvedata processing complexityVSAvoidverification reliability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The system employs unsupervised learning algorithms (t-SNE and DBSCAN) that automatically define classification criteria without requiring manual intervention. The algorithms self-organize the training data into clusters based on inherent patterns, automatically establishing clear classification boundaries and improving verification reliability while maintaining processing simplicity.

Inventive Principle:
Principle #25Self-service

Data Source

PatentUS12412258B2Substrate inspecting unit and substrate treating apparatus including the same
Publication Date: 2025.09.09 SYSTEM ENGINEERING MEGA SOLUTION CO LTD
  • US12412258B2 patent drawing
  • US12412258B2 patent drawing
  • US12412258B2 patent drawing

AI summary

Provided are a substrate inspecting unit capable of reducing image data labeling work time through training image data set verification and semi-automatic image labeling, and at the same time, improving prediction performance by improving classification accuracy for data sets, and a substrate treating apparatus including the same. The substrate inspecting unit comprises a feature extracting module for extracting a feature from training data included in each class in response to a plurality of training data related to image data of a substrate being classified according to a predefined class, a validity evaluating module for evaluating validity of the feature, a class verifying module for verifying the predefined class, and a data reconstructing module for reconstructing the plurality of training data based on a feature determined as valid and a verified class, wherein reconstructed training data is utilized when inspecting the substrate.