Substrate Inspection Thermal Control for Probe Alignment
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Solution Overview
Problem
Existing inspection systems face challenges in accurately determining the junction temperature of electronic devices during electrical characteristics inspection, leading to potential overheating and thermal expansion issues that can affect yield and probe alignment, particularly when conducting temperature control.
Innovation Solution
An inspection system with integrated temperature control mechanisms, including a substrate holder and detector, uses a controller to adjust and estimate junction temperature by analyzing heat flows and thermal resistances, ensuring precise temperature settings and minimizing thermal expansion differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If inspection power is supplied to electrodes during electrical characteristics inspection, then electrical testing can be performed, but junction temperature increases causing overheating and thermal expansion
Solution Approach 1:
The system continuously monitors the junction temperature through the probe card and substrate holder temperature detection mechanisms, and the controller dynamically adjusts the inspection power supply and cooling mechanism based on real-time temperature feedback to maintain temperature within a safe range
Solution Approach 2:
A cooling mechanism is introduced as an intermediary between the power supply and the substrate to dissipate heat. The cooling mechanism acts as a thermal intermediary that removes excess heat generated during inspection, enabling sustained power application without overheating
2Temperature
If temperature control is performed during inspection, then junction temperature can be maintained, but probe alignment may be affected due to thermal expansion
Solution Approach 1:
The system performs preliminary temperature equalization between the probe card and substrate holder before inspection begins. By pre-conditioning both components to the same temperature, thermal expansion differences are minimized during the inspection process, maintaining probe alignment accuracy
Solution Approach 2:
The system dynamically adjusts the temperature parameters of both the probe card and substrate holder to match each other's temperature state. This parameter coordination ensures that thermal expansion effects are synchronized, preventing relative displacement between probe and substrate
3Temperature
If separate temperature control mechanisms are used for probe card and substrate holder, then temperature can be regulated, but system complexity increases
Solution Approach 1:
The temperature control functions for the probe card and substrate holder are merged into a unified control system. The controller coordinates both temperature regulation mechanisms simultaneously, sharing control logic and data, which reduces overall system complexity while maintaining effective temperature regulation
Solution Approach 2:
The controller is designed with multi-functionality, handling both temperature regulation tasks for different components through a single integrated unit. This universal approach consolidates control functions, reducing the number of separate control mechanisms needed and simplifying the overall system architecture
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables accurate temperature control, preventing overheating and probe misalignment, thereby improving yield and reducing costs by optimizing junction temperature settings and probe alignment.
Implementation Method 1
a holder temperature adjustment mechanism configured to detect a temperature of the substrate holder and adjust the temperature of the substrate holder
Implementation Method 2
adjust the temperature of the substrate holder
Implementation Method 3
a detector temperature adjustment mechanism configured to detect a temperature of the detector and adjust the temperature of the detector
Implementation Method 4
a detector configured to supply inspection power to an electrode of the substrate
Data Source
AI summary
Provided are an inspection system and a temperature control method for inspecting a substrate while performing appropriate temperature control. The inspection system, which inspects a substrate while performing temperature control, includes a substrate holder that holds the substrate; a detector that supplies inspection power to an electrode of the substrate; a holder temperature adjustment mechanism that detects a temperature of the substrate holding unit, and adjusts the temperature of the substrate holder; a detector temperature adjustment mechanism that detects a temperature of the detector, and adjusts the temperature of the detector; and a controller. The controller adjusts the temperature control performed by the holder temperature adjustment mechanism and the detector temperature adjustment mechanism while the substrate is being inspected.