Substrate Interconnection Structure With Low-Profile Metal Pillars

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Solution Overview

Problem

Conventional semiconductor packages are inadequate, leading to excess cost, decreased reliability, and large package sizes.

Innovation Solution

The use of an adhesive layer to attach an upper electronic package to a lower die and metal pillars for electrical connection, where the pillars have a smaller height than the die, along with an encapsulant covering the package, to reduce thickness and processing time while maintaining electrical connectivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional semiconductor packages are used, then electrical connectivity is achieved, but package size becomes too large

Engineering Contradiction:
Improvepackage sizeVSAvoidelectrical connectivity
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent transitions from planar packaging to three-dimensional stacking architecture, where multiple semiconductor dies are vertically stacked and interconnected through through-silicon vias (TSVs). This vertical integration enables electrical connectivity between layers while dramatically reducing the horizontal footprint and overall package volume compared to conventional lateral interconnections.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nested interconnection structures where conductive TSVs are embedded within semiconductor dies, which are then stacked and enclosed within a protective package substrate. The TSVs are nested within the die structure, and multiple dies are nested vertically, creating a compact hierarchical arrangement that reduces package size while maintaining connectivity.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Ease of manufacture

If conventional semiconductor packages are used, then structural support is provided, but manufacturing cost increases

Engineering Contradiction:
Improvemanufacturing costVSAvoidstructural support
Core Design Contradiction:
Ease of manufactureVSStrength

Solution Approach 1:

The package substrate serves multiple functions simultaneously: it provides mechanical support for the stacked dies, acts as an interconnection carrier with embedded conductive traces, offers thermal management pathways, and provides environmental protection. This multi-functionality eliminates the need for separate structural components, reducing manufacturing complexity and cost while maintaining structural integrity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the structural support function with the electrical interconnection function by integrating conductive TSVs directly into the semiconductor dies and combining multiple dies into a single stacked assembly. This consolidation reduces the number of discrete components and assembly steps, thereby lowering manufacturing cost while preserving structural support through the integrated architecture.

Inventive Principle:
Principle #5Merging (Combining)

3Length of moving object

If metal pillars with larger height are used, then electrical connectivity is improved, but device thickness increases

Engineering Contradiction:
Improvedevice thicknessVSAvoidelectrical connectivity
Core Design Contradiction:
Length of moving objectVSReliability

Solution Approach 1:

The patent employs vertical TSV interconnections that traverse through the thickness of semiconductor dies to establish electrical pathways between stacked layers. This vertical routing in the thickness dimension enables efficient electrical connectivity without requiring lateral extension, thereby maintaining compact device thickness while achieving reliable inter-layer connections.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The package substrate acts as an intermediary structure that receives and routes electrical signals from TSVs of stacked dies. The substrate's conductive traces and vias provide additional connection pathways, enabling reliable electrical connectivity between different die layers without requiring excessively long TSVs, thus controlling overall device thickness.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in a semiconductor device with reduced thickness and processing costs, enhanced reliability, and improved manufacturing efficiency.

Implementation Method 1

utilizing an adhesive layer to attach an upper electronic package to a lower die

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS11869875B2Electronic device having a substrate-to-substrate interconnection structure and manufacturing method thereof
Publication Date: 2024.01.09 AMKOR TECH SINGAPORE HLDG PTE LTD
  • US11869875B2 patent drawing
  • US11869875B2 patent drawing
  • US11869875B2 patent drawing

AI summary

An electronic device and a method of making an electronic device. As non-limiting examples, various aspects of this disclosure provide various methods of manufacturing electronic devices, and electronic devices manufactured thereby, that comprise utilizing an adhesive layer to attach an upper electronic package to a lower die and/or utilizing metal pillars for electrically connecting the upper electronic package to a lower substrate, wherein the metal pillars have a smaller height above the lower substrate than the lower die.