Substrate Jig Optical Teaching for Robot Positioning Accuracy
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate processing apparatuses require time-consuming and labor-intensive manual adjustment of transport robot positions for teaching, necessitating precise positioning of target jigs relative to substrate holders, which is inefficient and costly.
Innovation Solution
A substrate processing apparatus and method that utilizes a substrate rotation mechanism to form a circular rotation trajectory on a substrate holder, combined with optical sensors and a teaching unit to calculate and generate teaching information for the transport robot, simplifying the process of determining relative positions between the transport robot's hand and the substrate holder.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual positioning of target jig relative to substrate holder is performed with high accuracy, then teaching information can be generated, but considerable time and effort are required
Solution Approach 1:
The patent replaces the mechanical positioning system with an optical detection system. Instead of manually positioning the target jig using mechanical adjustments, the system uses optical sensors to detect the position of marks on the substrate holder and automatically calculates the relative position, thereby eliminating time-consuming manual positioning while maintaining high accuracy
Solution Approach 2:
The patent uses optical sensors to create an optical copy or detection of the physical position marks on the substrate holder. The sensors detect the marks and the system calculates relative positions based on this optical information, replacing the need for physical manual positioning and reducing teaching time significantly
2Measurement precision
If target jig positioning is performed in each processing unit, then accurate teaching information is obtained, but much considerable time and effort are necessary
Solution Approach 1:
The substrate holder performs self-positioning by having marks that can be automatically detected by optical sensors. The system uses the marks on the substrate holder itself to determine relative positions without requiring external positioning assistance or manual intervention in each processing unit, thereby improving teaching efficiency while maintaining accuracy
Solution Approach 2:
The patent creates a universal positioning system where marks on the substrate holder can be detected by optical sensors in any processing unit. This universal approach allows the same detection method to be applied across all processing units without requiring unit-specific positioning procedures, significantly improving overall teaching efficiency
3Reliability
If precise positioning of target jig is required before driving transport robot, then teaching can be performed, but the process becomes complex and time-consuming
Solution Approach 1:
The patent extracts the positioning function from the mechanical positioning process and transfers it to the optical detection system. The marks on the substrate holder serve as extracted position references that can be detected optically, eliminating the need for complex mechanical positioning procedures while ensuring reliable teaching
Solution Approach 2:
The patent introduces marks on the substrate holder as an intermediary element between the substrate holder and the optical sensors. These marks serve as mediators that carry position information, allowing the system to determine relative positions through optical detection rather than complex mechanical measurements, thereby simplifying the overall process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Simplifies the generation of teaching information, reducing the time and effort required for positioning the transport robot, thereby enhancing efficiency and accuracy in substrate processing.
Implementation Method 1
three optical sensors that are arranged nonlinearly... calculates a position of the hand relative to the substrate holder in plan view in accordance with the position of the hand relative to the rotation trajectory obtained from each of the three optical sensors
Data Source
AI summary
In a substrate processing apparatus, when a hand located above a substrate holder holds a substrate jig having a lower surface provided with three photosensors that are arranged nonlinearly, a substrate rotation mechanism rotates the substrate holder to form a circular rotation trajectory of a mark provided in advance on the substrate holder. A teaching unit calculates the position of the hand relative to the substrate holder in plan view in accordance with the position of the hand relative to the rotation trajectory obtained from each of the three photosensors and generates horizontal teaching information that indicates an adequate relationship between the relative positions of the hand and the substrate holder in plan view. This simplifies processing for generating teaching information.