Substrate Laminating Apparatus Vacuum Chamber Alignment

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Solution Overview

Problem

Current substrate laminating apparatuses for stereoscopic display devices face challenges in achieving high precision lamination while minimizing cost and space, particularly when using lenticular lens substrates, due to complex camera systems and vacuum chamber designs that increase costs and compromise alignment precision.

Innovation Solution

A substrate laminating apparatus with a first vacuum chamber and a second vacuum chamber, where the image capturing unit is positioned outside to capture positional information of the second substrate, allowing for precise alignment and lamination without the need for expensive vacuum-resistant cameras or complex transport mechanisms, and utilizing a uniaxial moving structure to reduce mechanical components and save space.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If vacuum-resistant cameras and complex transport mechanisms are used inside the vacuum chamber, then alignment precision can be maintained, but device complexity and cost increase significantly

Engineering Contradiction:
Improvealignment precisionVSAvoidcamera system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The image capturing unit is extracted from the vacuum chamber environment and positioned on the outer side of the first opening. This allows the use of standard cameras instead of expensive vacuum-resistant cameras, reducing device complexity while maintaining measurement precision through the uniaxial moving structure that brings the camera into alignment position during operation

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The vacuum chamber system is segmented into two independent chambers (first vacuum chamber and second vacuum chamber) with independent table positioning systems. This segmentation allows each chamber to be optimized independently and simplifies the overall control system while maintaining μm-level alignment precision

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If multiple vacuum chambers with independent positioning systems are used, then alignment precision in the order of μm can be achieved, but the apparatus occupies more space

Engineering Contradiction:
Improvelamination precisionVSAvoidapparatus footprint
Core Design Contradiction:
Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The first vacuum chamber is designed to move uniaxially (in one dimension) to position the first opening facing the second opening. This uniaxial movement reduces the need for complex multi-axis positioning mechanisms, minimizing the apparatus footprint while achieving μm-level lamination precision through the controlled movement of the entire first vacuum chamber

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If standard cameras are used outside the vacuum chamber, then cost is reduced, but capturing positional information of substrates inside the vacuum chamber becomes difficult

Engineering Contradiction:
Improvecost reductionVSAvoidsubstrate position detection
Core Design Contradiction:
Ease of manufactureVSDifficulty of detecting and measuring

Solution Approach 1:

The first vacuum chamber is moved in advance to a predetermined position where the first opening faces the second opening, allowing the image capturing unit positioned outside to capture images of the second substrate inside the vacuum chamber. This preliminary positioning action enables standard cameras to effectively detect substrate positions without requiring vacuum-resistant equipment

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS10718953B2Substrate laminating apparatus, substrate laminating method, and stereoscopic display device
Publication Date: 2020.07.21 TIANMA MICRO ELECTRONICS CO LTD
  • US10718953B2 patent drawing
  • US10718953B2 patent drawing
  • US10718953B2 patent drawing

AI summary

A substrate laminating apparatus, including a first vacuum chamber including a first opening; a first table provided inside the first opening for holding a first substrate; a second vacuum chamber including a second opening; a second table provided inside the second opening for holding a second substrate, wherein the substrates are laminated by reducing a pressure in a closed space formed by having the first opening faced with the second opening. The apparatus also includes a vacuum evacuation unit connected to the first vacuum chamber or the second vacuum chamber and performs reduced-pressure evacuation of the closed space. When there is a direction along which priority is given on lamination precision when laminating the first and second substrates, and the direction is defined as a lamination precision priority direction, a reduced-pressure evacuation direction done by the vacuum evacuation unit is a direction different from the lamination precision priority direction.