Substrate Holder Lid Insulation for Faster Thermal Cycling
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in efficiently heating and cooling substrates due to inadequate thermal insulation and temperature regulation, leading to prolonged processing times and increased downtime.
Innovation Solution
A substrate processing apparatus with a thermal insulator that includes a partition member forming a second space, allowing for the supply and exhaust of temperature regulation fluids, which shortens heating/cooling times by maintaining the thermal insulator at optimal temperatures and reducing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If a thermal insulator is installed in the space covered by the cover section, then heat loss is reduced, but the heating and cooling time of the thermal insulator itself increases processing time
Solution Approach 1:
The thermal insulator is divided into a first insulator and a second insulator separated by a partition member. The first insulator is installed in the first space (reaction container interior) and the second insulator is installed in the second space (cover section interior). This segmentation allows independent temperature control of each insulator, enabling the second insulator to be cooled independently to reduce overall system cooling time while the first insulator maintains thermal insulation during processing.
Solution Approach 2:
A partition member is introduced as an intermediary structure between the two insulators. This partition member includes a through-hole that allows temperature regulation fluid to pass from the first space to the second space, enabling thermal coupling when needed while maintaining structural separation. The partition member facilitates controlled thermal interaction between the two insulator spaces.
2Duration of action of moving object
If the thermal insulator is heated to reduce cooling time, then cooling efficiency improves, but the loading chamber and its components may overheat
Solution Approach 1:
The thermal management system is segmented into two independent zones: the first space containing the reaction container and the second space containing the cover section. By heating only the second insulator in the cover section rather than the entire thermal insulator assembly, the system reduces cooling time for the cover section without causing overheating in the loading chamber area, thus controlling the temperature distribution spatially.
Solution Approach 2:
Temperature regulation is applied locally to specific regions rather than uniformly across the entire system. The second insulator in the cover section can be heated independently to reduce cooling time, while the first insulator in the reaction container maintains appropriate thermal conditions. This local quality approach allows differential temperature management to optimize both cooling efficiency and prevent overheating in different areas.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves faster heating and cooling of substrates, reducing processing time and downtime, while preventing overheating of the loading chamber and its components.
Implementation Method 1
a thermal insulator installed on the lid and configured to thermally insulate a first space below the substrate holder
Implementation Method 2
a supply port for supplying a temperature regulation fluid to the second space and an exhaust port for discharging the temperature regulation fluid from the second space
Data Source
AI summary
A substrate processing apparatus includes: a process container accommodating a substrate holder that holds a plurality of substrates and including an opening at a lower end of the process container; a lid configured to open and close the opening; and a thermal insulator installed on the lid and configured to thermally insulate a first space below the substrate holder. The thermal insulator includes a partition member that forms a second space partitioned from the first space. The lid includes a supply port for supplying a temperature regulation fluid to the second space and an exhaust port for discharging the temperature regulation fluid from the second space.