Substrate Support Lift Mechanism for Parallelism

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Solution Overview

Problem

Existing lift mechanisms in semiconductor processing chambers struggle to maintain precise parallelism between the substrate support and the processing chamber, leading to process non-uniformity and potential substrate damage during transfer due to tangential clamping forces and drift issues.

Innovation Solution

A substrate support lift assembly featuring a yoke with a curved surface, a base with a matching curved surface, and a threaded member, along with a gimbal assembly and dual carriage bearing assembly, which allows for precise adjustment and securement of the substrate support without inducing rotational moments or drift, ensuring parallelism and stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional clamping arrangement is used to couple the substrate support to the lift mechanism, then the substrate support can be secured in position, but tangential clamping forces induce rotational moments that cause drift away from the desired parallelism position

Engineering Contradiction:

Improveparallelism maintenanceVSAvoidsecuring stability

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The patent inverts the conventional clamping approach by using a clamp block with a clamping aperture that receives the shaft, rather than a shaft with a clamp. The clamping force is applied axially to the shaft through the aperture, eliminating tangential forces and rotational moments. This inversion of the clamping geometry fundamentally resolves the drift problem while maintaining secure positioning.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent introduces a clamp block as an intermediary component between the lifting mechanism and the substrate support shaft. This clamp block with its clamping aperture acts as a mediator that transmits vertical clamping forces without generating rotational moments, thereby preventing drift while maintaining secure coupling. The intermediary structure decouples the clamping function from the rotational moment generation.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Stability of the object's composition

If the substrate support is clamped tightly to prevent movement, then positioning stability is improved, but mechanical deflection and drift during securing procedures increase

Engineering Contradiction:

Improvepositioning stabilityVSAvoidparallelism precision

Core Design Contradiction:

Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

By inverting the clamping geometry to apply axial forces through a clamping aperture rather than tangential forces, the patent achieves stable positioning without inducing rotational moments that cause drift. The inverted clamping approach maintains positioning stability while eliminating the precision-degrading drift effect.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent applies preliminary anti-action by designing the clamping aperture and shaft interface to preemptively counteract the drift-inducing rotational moments. The axial clamping geometry is configured to oppose and eliminate the harmful rotational forces before they can cause drift, thereby maintaining both stability and precision simultaneously.

Inventive Principle:

Principle #9Preliminary anti-action

3Adaptability or versatility

If the lift mechanism allows adjustment of the substrate support plane, then adaptability is improved, but the adjustment mechanisms are difficult to secure and prone to drift

Engineering Contradiction:

Improveplane adjustment capabilityVSAvoidadjustment security

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent inverts the adjustment and securing mechanism by using a clamp block with a clamping aperture that receives the shaft. This inverted geometry allows plane adjustment while securing the adjustment through axial clamping forces that prevent drift. The inversion resolves the security problem inherent in conventional adjustment mechanisms.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The clamp block acts as an intermediary that facilitates plane adjustment while maintaining secure positioning. The clamping aperture receives the shaft and allows adjustment movements, then secures the adjusted position through axial clamping forces. This intermediary structure enables both adaptability and reliability in the adjustment mechanism.

Inventive Principle:

Principle #24Intermediary (Mediator)

Data Source

PatentUS7871470B2Substrate support lift mechanism

Publication Date: 2011.01.18 APPLIED MATERIALS INC

AI summary

An apparatus for positioning a substrate support within a processing chamber is provided. In one embodiment, an apparatus for positioning a substrate support includes a yoke comprising a curved surface with a first slot formed therethrough, a base comprising a first surface adapted to support the substrate support and a curved second surface, wherein the curved second surface mates with the curved surface of the yoke and a first slot is formed through the curved second surface of the base, and a first threaded member disposed through the first slot in the yoke and the first slot in the base.