Adjustable Link Joints for Substrate Handler Droop Correction
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Solution Overview
Problem
Gas-phase reactor systems face challenges in substrate handling due to deflection of transfer device links at high temperatures, leading to substrate damage and contamination from moving parts.
Innovation Solution
An adjustable joint is integrated into the substrate handling device to allow for pitch and roll adjustments of links, ensuring precise alignment of the end effector with the substrate plane, and the end effector is positioned to be at least 100 mm away from any gearing to minimize contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If substrate transfer device links are used at high temperatures, then substrate processing can be performed, but the links deflect (droop) causing substrate position deviations and potential damage
Solution Approach 1:
The patent implements adjustable joints with set screws that allow dynamic adjustment of link orientation to compensate for thermal deflection. The joints can be adjusted during or after installation to correct drooping caused by high temperature operation, maintaining substrate positioning accuracy despite thermal effects.
Solution Approach 2:
The patent changes the orientation parameter of the links through adjustable joints with set screws. By adjusting the pitch and/or roll angles of the links, the system compensates for thermal deflection and maintains precise substrate positioning at high temperatures.
2Ease of operation
If moving parts (gearing) are used in the substrate transfer device, then mechanical motion and positioning are achieved, but particulate contamination is generated that can damage substrates
Solution Approach 1:
The patent removes gearing from the substrate transfer device entirely, replacing it with gearless adjustable joints that use set screws and friction-based mechanisms. This extraction of the harmful gearing component eliminates the source of particulate contamination while maintaining mechanical motion capability through alternative means.
Solution Approach 2:
The patent substitutes traditional gear-based mechanical systems with gearless adjustable joints that use friction and set screw mechanisms. This replacement eliminates gear teeth and associated particulate generation while achieving the necessary mechanical motion and positioning functions.
3Device complexity
If fixed joints are used in the substrate transfer device, then structural simplicity is maintained, but deflection correction and alignment adjustment are not possible
Solution Approach 1:
The patent transitions from fixed joints to dynamically adjustable joints with set screws. The joints allow pitch and/or roll adjustments to correct alignment errors and compensate for deflection, then can be locked in place. This adds minimal complexity while significantly improving alignment precision.
Solution Approach 2:
The patent incorporates preliminary adjustment capability in the joint design, allowing alignment corrections to be made during assembly or maintenance. The adjustable joints enable pre-correction of deflection and alignment issues before operation, improving precision without requiring complex active control systems.
Data Source
AI summary
An adjustable joint for insertion into a linkage of a substrate handler utilized for substrate processing. The adjustable joint allows for adjusting the pitch and roll of an attached link. Such adjustment may permit aligning a pickup surface of an end effector to a desired plane. Once adjusted, the joint may be fixed to maintain the desired orientation of the attached link. The adjustable joint allows for correcting deflection of a pickup surface of an end effector relative to a desired pickup plane due to, for example, drooping caused by high temperature usage, mechanical tolerances and/or installation errors.