Substrate Liquid Circulation Branching to Prevent Filter Cleaning Mix
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Solution Overview
Problem
The mixing of stripping and cleaning liquids in a substrate processing apparatus can lead to problems depending on the type and state of each liquid, which is not addressed by existing technologies.
Innovation Solution
A substrate processing apparatus with a circulation pipe branching into two pipes, each with a filter, and controlled by switching sections to manage the flow of different processing liquids, allowing for separate cleaning and processing steps to prevent liquid mixing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the circulation filter is cleaned by causing cleaning liquid to flow backward, then the filter cleaning process becomes effective, but the stripping liquid and cleaning liquid mix causing processing problems
Solution Approach 1:
The circulation pipe is divided into a first branch pipe and a second branch pipe, with the filter installed only in the first branch pipe. This segmentation allows the first processing liquid to be filtered while the second processing liquid bypasses the filter during backward flow, preventing mixing of stripping and cleaning liquids.
Solution Approach 2:
The system dynamically switches the flow path of processing liquids using switching sections. During forward flow, the first processing liquid passes through the filter; during backward flow for cleaning, the second processing liquid bypasses the filter. This dynamic control prevents liquid mixing while maintaining cleaning effectiveness.
2Device complexity
If a single circulation pipe is used for both processing and cleaning, then the system structure is simple, but processing and cleaning liquids cannot be separately managed
Solution Approach 1:
The circulation pipe is segmented into two branch pipes: the first branch pipe contains the filter for processing liquid filtration, while the second branch pipe serves as a bypass for cleaning liquid. This segmentation enables separate management of processing and cleaning liquids while maintaining relatively simple system structure.
Solution Approach 2:
The circulation pipe system serves multiple functions: during forward flow it filters and circulates processing liquid, during backward flow it enables filter cleaning by bypassing the filter with cleaning liquid. The switching sections and branch pipe configuration provide multi-functionality without requiring completely separate systems.
Data Source
AI summary
Provided is a substrate processing apparatus that makes it possible to prevent or reduce a problem caused by mixing of a processing liquid for processing a substrate and a processing liquid for cleaning a filter. A substrate processing apparatus (100) includes: a circulation pipe (21) that includes a part branching into two pipes, which are a first branch pipe and a second branch pipe; a filter (53) that filters a first processing liquid and that is provided to at least the first branch pipe; and a controller (73) that carries out a first cleaning process in which a second processing liquid is allowed to flow into the first branch pipe in a backward direction, and then a third processing liquid is allowed to flow into the first branch pipe in the backward direction.