Substrate Liquid Recovery Bowl Layout for Complete Chemical Drainage
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Solution Overview
Problem
Conventional substrate treating liquid recovery units in semiconductor manufacturing facilities face inefficiencies, leading to residual chemicals and particle generation, which can result in substrate defects due to incomplete cleaning and chemical reactions.
Innovation Solution
A substrate treating liquid recovery unit with a unique design featuring multiple recovery containers and an elevating unit, where each container is configured to recover different substrate treating liquids, and the elevating unit adjusts the recovery unit's height based on the substrate's rotation speed, ensuring efficient discharge and minimizing residual chemicals through inclined and non-planar surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional bowl structure is used to recover substrate treating liquid, then the recovery unit is simple in structure, but the chemical remains inside the bowl causing particle generation and substrate defects
Solution Approach 1:
The recovery unit is divided into multiple segmented bowls (first bowl, second bowl, third bowl) with distinct functions. Each bowl has specific structures like inclined bases, recovery lines, and drainage holes that work together to prevent chemical accumulation. This segmentation allows complete drainage while maintaining manageable structural complexity.
Solution Approach 2:
The bowls are designed with curved surfaces and inclined bases rather than flat bottoms. The inclined base structure guides liquid flow toward the recovery line, ensuring complete drainage. The curved surfaces prevent dead zones where chemical could accumulate, eliminating particle generation sources while keeping the structure relatively simple.
2Productivity
If the recovery unit uses a simple bowl structure, then the device complexity is low, but cleaning efficiency is insufficient and chemicals remain
Solution Approach 1:
The recovery unit is designed with pre-configured inclined bases and recovery lines that automatically guide liquid flow during operation. The structure is prepared in advance to ensure complete drainage without requiring additional active cleaning mechanisms, thereby improving cleaning efficiency while maintaining structural simplicity.
Solution Approach 2:
The recovery unit structures enable self-cleaning through their inclined bases and drainage systems. Liquid naturally flows to the recovery lines and drains completely through gravity, eliminating the need for external cleaning interventions. This self-service mechanism improves cleaning efficiency without adding complex active cleaning systems.
3Object-affected harmful factors
If chemicals remain in the recovery bowl, then the recovery unit structure is simple, but particles are generated through fume or scattering causing substrate defects
Solution Approach 1:
The design extracts and removes chemicals from the recovery bowls through inclined bases that guide liquid to recovery lines with drainage holes. This extraction mechanism ensures complete removal of chemicals that could otherwise generate particles through fume or scattering, preventing substrate defects while keeping the structural addition minimal.
Solution Approach 2:
The inclined base structure converts the potential harm of residual chemicals into beneficial complete drainage. By designing the base to naturally guide liquid flow toward the recovery line, the system ensures that chemicals are completely removed rather than accumulated, transforming a harmful situation into a beneficial self-cleaning mechanism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances cleaning efficiency, reduces substrate defects, and ensures safe and effective recycling of chemicals by preventing contamination and chemical reactions, while allowing for the separation and recovery of different chemical types, thereby improving the overall substrate treatment process.
Implementation Method 1
a first base for discharging the substrate treating liquid to an outside through a first recovery line, and including a third portion disposed on one side of the substrate support unit and a fourth portion disposed on the other side of the substrate support unit
Implementation Method 2
a second portion adjacent to the first portion, wherein at least a part of the second portion is formed to be inclined downwardly in a direction, in which the first portion is located
Data Source
AI summary
A substrate treating liquid recovery unit with improved cleaning efficiency and a substrate treating apparatus including the same are provided. The substrate treating apparatus includes a substrate support unit; and a substrate treating liquid recovery unit surrounding the substrate support unit, for recovering a substrate treating liquid, and including a first recovery container, wherein the first recovery container comprises a first base for discharging the substrate treating liquid to an outside through a first recovery line, and including a third portion disposed on one side of the substrate support unit and a fourth portion disposed on the other side of the substrate support unit; a first sidewall extending upwardly from one end of the first base; a first upper plate extending obliquely and upwardly from an end of the first sidewall; and a first inner wall extending upwardly from the other end of the first base.