Substrate Liquid Line Sensing for Valve Leak Detection
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Solution Overview
Problem
Existing substrate liquid processing apparatuses face challenges in accurately detecting leaks in valve mechanisms, which can lead to unintended dripping of processing liquids onto substrates, altering chemical concentrations, or poor drying, due to the inability to reliably determine the presence or absence of processing liquids in supply lines.
Innovation Solution
A substrate liquid processing apparatus equipped with a liquid detection sensor that uses detection light to determine the presence or absence of processing liquids in supply lines by comparing reception amounts with threshold values, allowing for accurate leak detection and valve mechanism integrity assessment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a flow rate measurement method based on response time is used to detect leaks, then the detection can be performed without additional sensors in the liquid pipe, but the measurement precision and reliability of leak detection deteriorates due to inability to directly detect liquid presence
Solution Approach 1:
The patent replaces the indirect mechanical flow rate measurement method with an optical detection system. A liquid detection sensor using light emission and reception directly detects the presence or absence of processing liquid in the liquid pipe, substituting the indirect response time-based mechanical measurement with direct optical detection, thereby improving measurement precision while maintaining acceptable device complexity
Solution Approach 2:
The patent introduces an optical intermediary (light) as a mediator to detect liquid presence. The light emission unit sends light through the liquid pipe, and the light reception unit detects the light after it passes through or reflects off the liquid, using the optical intermediary to indirectly sense the liquid's presence without direct mechanical contact, thus achieving precise detection while keeping the system relatively simple
2Device complexity
If no liquid detection sensor is installed in the liquid pipe, then the device configuration remains simple, but the reliability of leak detection deteriorates due to inability to accurately determine liquid presence
Solution Approach 1:
The patent substitutes mechanical sensor installation in the liquid pipe with an optical detection system. The light emission and reception units are positioned to detect liquid presence optically without requiring physical sensors inside the liquid pipe, replacing mechanical intrusion with non-contact optical measurement, thereby improving reliability while maintaining simple device configuration
Solution Approach 2:
The patent uses light as an intermediary to detect liquid presence without direct contact. The optical mediator allows the system to sense liquid presence in the valve mechanism and liquid pipe without installing physical sensors that could contaminate the processing liquid or complicate the device structure, thus improving reliability while keeping the configuration simple
3Device complexity
If indirect flow rate measurement is used instead of direct liquid presence detection, then the device configuration is simpler, but the measurement precision of liquid detection deteriorates
Solution Approach 1:
The patent replaces indirect mechanical flow rate measurement with direct optical liquid presence detection. Instead of measuring flow rate through pressure or response time changes, the system directly detects whether liquid is present in the liquid pipe using light absorption or reflection principles, substituting indirect mechanical measurement with direct optical detection to improve precision
Solution Approach 2:
The patent introduces light as an intermediary mediator to directly sense liquid presence. The light emission unit sends light through the liquid pipe, and the light reception unit detects changes in light properties caused by the liquid's presence, using the optical intermediary to achieve direct and precise liquid detection without mechanical contact or indirect measurement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise detection of leaks and valve malfunctions, preventing unintended liquid dripping and ensuring stable substrate processing by accurately determining the presence or absence of processing liquids, even for small leak rates, and simplifying device configuration.
Implementation Method 1
a liquid detection sensor configured to detect presence or absence of the processing liquid in the at least one liquid pipe
Data Source
AI summary
A substrate liquid processing apparatus includes: at least one liquid pipe through which a processing liquid flows; a discharge nozzle configured to discharge the processing liquid supplied via the at least one liquid pipe; a valve mechanism configured to regulate a flow of the processing liquid in the at least one liquid pipe; and a liquid detection sensor configured to detect presence or absence of the processing liquid in the at least one liquid pipe, wherein in a state in which the valve mechanism is operating so that the processing liquid in the at least one liquid pipe is located at an upstream of a first pipe measurement site of the at least one liquid pipe, the liquid detection sensor detects the presence or absence of the processing liquid at the first pipe measurement site located at a first measurement point.