Substrate Storage Container Locking Mechanism Stability
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Solution Overview
Problem
Conventional substrate storage containers face issues with damage and deformation due to unstable locking mechanisms, which can lead to semiconductor wafer damage and pollution, and complicate assembly processes.
Innovation Solution
A substrate storage container with a locking mechanism featuring a rotary driver and a locking bar that uses first and second cam portions to support the locking bar in a swayable manner, allowing the locking bar to project into the container body without contact and then move in the thickness direction to securely engage with the locking hole, ensuring stability and ease of assembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the locking mechanism uses a simple connection between latch bar and cam plate, then the assembly is easy to manufacture, but the locking mechanism becomes unstable under impact and can unlock causing damage to substrates
Solution Approach 1:
The locking bar is pre-positioned in a retracted state within the door body before the locking operation begins. The cam plate is pre-configured with cam surfaces that will guide the locking bar into the correct engagement position with the locking hole, ensuring proper alignment before the actual locking action occurs.
Solution Approach 2:
The cam plate structure incorporates a cam surface that gradually guides the locking bar into the locking hole, providing a cushioning effect that absorbs impact forces. This gradual engagement prevents sudden shocks that could cause unlocking, while the cam surface geometry ensures smooth and stable locking bar insertion.
2Device complexity
If the locking bar is directly inserted into the locking hole, then the locking action is simple, but the locking mechanism generates particles through sliding contact and deforms the locking bar
Solution Approach 1:
The cam plate is pre-configured with a cam surface that defines the exact trajectory and orientation for locking bar insertion. This preliminary positioning ensures the locking bar enters the locking hole at the correct angle and position, preventing sliding contact that would generate particles or cause deformation.
Solution Approach 2:
The cam surface acts as an intermediary element between the locking bar and the locking hole. Instead of direct insertion, the cam surface guides and mediates the locking bar's movement, ensuring smooth engagement without harmful sliding contact or misalignment.
3Ease of operation
If the door is shallowly fitted to the container body before locking, then the locking mechanism has space to operate, but the door is not securely locked until the final drawing in action
Solution Approach 1:
The door is preliminarily positioned in a shallowly fitted state that provides adequate space for the locking mechanism components to operate. The cam plate and locking bar are pre-configured to perform the drawing-in action, transforming this temporary shallow state into a secure locked state through the locking operation.
Solution Approach 2:
The locking mechanism incorporates a dynamic drawing-in action where the locking bar moves from a retracted position to an engaged position, actively pulling the door into the container body. This dynamic action transitions the door from a shallowly fitted unstable state to a securely locked stable state.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution prevents damage and deformation of substrates and the locking mechanism, stabilizes the locking operation, and simplifies the assembly process, while preventing unlocking due to impacts, ensuring secure and efficient storage.
Implementation Method 1
first and second cam portions, and when the door is locked, the rotary driver is rotated in a locking direction to cause the first and second cam portions to follow the locking bar
Data Source
AI summary
A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.