Substrate Container Locking Claw for Metal-Free Sealing
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Solution Overview
Problem
Existing substrate storage containers face issues with resin pins lacking sufficient strength and durability, leading to potential breakage and compromised sealing performance, which can contaminate semiconductor wafers.
Innovation Solution
A metal-free locking mechanism using resin-made locking claws that move linearly and swing to ensure proper engagement with locking pockets, integrating cam grooves and resin rollers for smooth operation and enhanced sealing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If resin pins are used instead of SUS pins in the locking mechanism, then the locking mechanism becomes metal-free and safer for semiconductor wafers, but the resin pins lack sufficient strength and durability leading to potential breakage
Solution Approach 1:
The patent applies composite materials by combining resin with glass fibers or carbon fibers to create reinforced composite pins. This composite structure maintains the metal-free advantage while significantly improving the strength and durability of the locking mechanism components, preventing breakage during operation.
Solution Approach 2:
The patent changes the physical parameters of the resin pins by increasing their diameter and adjusting their dimensional specifications. This parameter modification compensates for the inherently lower strength of resin materials compared to metal, ensuring sufficient mechanical performance without introducing metal contamination.
2Reliability
If the diameter of resin pins is increased to improve strength, then the locking mechanism becomes more durable, but the pressing roller becomes thicker making it difficult for the locking claw to return
Solution Approach 1:
The patent optimizes the dimensional parameters of both the resin pins and pressing rollers through precise design calculations. By carefully selecting the diameter of pins and the thickness of rollers within specific ranges, the invention achieves a balance where the pins have sufficient strength while the locking claw can still return smoothly to its initial position.
3Ease of operation
If the center of swing of the locking claw is shifted to improve returnability, then the locking claw can return more easily, but the engagement with the locking pocket becomes insufficient compromising sealing performance
Solution Approach 1:
The patent employs parameter optimization by precisely adjusting the swing center position, swing angle, and engagement depth of the locking claw within specific numerical ranges. This parameter tuning ensures that the locking claw maintains sufficient engagement with the locking pocket for reliable sealing while preserving smooth returnability during the unlocking operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures the locking mechanism operates smoothly, maintains sufficient sealing performance, and prevents contamination of semiconductor wafers, while reducing the risk of parts failure.
Implementation Method 1
each locking mechanism guide member has a cam groove 17 formed on the opposite surface, and the locking claw 40 has a cam protrusion 46 that fits in the cam groove 17 of the locking mechanism guide member 16
Implementation Method 2
a resin roller 50 that rotates about the resin pin 49 so as to come into contact with an interior of the locking pocket 4 of the container body
Data Source
AI summary
Provided is a substrate storage container that can make locking mechanisms metal-free, also make locking claws of the locking mechanisms operate smoothly and ensure sufficient sealing performance of the lid. A locking claw 40 is comprised of a locking block 41 that can move linearly in an inside-outside direction of the lid body while being held between a pair of locking mechanism guide blocks of a lid 10 and can swing in a thickness direction of the lid body, joint bars 44 that are joined to an advancing/retracting bar 34 of a locking mechanism 30, and cam bosses 46 that are fitted into cam grooves 17 of the locking mechanism guide blocks. The locking block 41, the joint bars 44 and the cam bosses 46 are formed integrally from a molding material containing resin. A depressed portion is formed in the locking block 41, and a resin pin 49 is supported between both side ends of the depressed portion with a resin pressing roller 50 fitted on the resin pin 49. The cam boss has a pair of flat facets 47 formed on its peripheral surface. The cam groove 17 is formed of divided sections including: a straight linear-motion groove 19 that is in contact with the flat facets 47 to limit the swing of the locking claw 40; and an arcuate swinging-motion groove to allow the locking claw 40 to swing.