Substrate Process Log Extraction for Film Condition Optimization
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Solution Overview
Problem
Existing substrate processing technologies face challenges in optimizing film formation conditions efficiently, as they rely on manual identification of log information and lack automated processes to adjust conditions based on real-time process results.
Innovation Solution
An information processing apparatus with a registration reception unit, identification unit, process condition acquisition unit, optimization unit, and output unit that automatically identifies and optimizes process conditions by analyzing log information and process results from substrate processing apparatuses, enabling real-time adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual identification of log information is used, then the system is simpler to implement, but the productivity and efficiency of optimization are reduced
Solution Approach 1:
The system performs automatic identification of log information and process conditions without requiring manual operator intervention. The identification unit automatically extracts relevant log data based on process step information, and the optimization unit autonomously calculates optimized process conditions, enabling the system to serve itself and eliminate manual labor in the optimization process.
Solution Approach 2:
The patent replaces the manual mechanical process of identifying log information and calculating optimization conditions with an automated information processing system. The identification unit and optimization unit use computational methods to automatically process log data and determine optimized process conditions, substituting human operators with automated computational mechanisms.
2Productivity
If automated optimization is implemented, then productivity improves, but the difficulty of detecting and measuring process conditions increases
Solution Approach 1:
The identification unit acts as an intermediary between the raw log information and the optimization unit. It automatically extracts and identifies relevant process conditions from complex log data, transforming unstructured log information into structured process condition data that the optimization unit can process, thereby simplifying the overall detection and measurement process.
Solution Approach 2:
The system extracts only the necessary process condition information from the comprehensive log information of the substrate processing apparatus. The identification unit selectively extracts relevant log data corresponding to specific process steps, separating essential information from unnecessary data, which simplifies the analysis complexity while maintaining optimization effectiveness.
3Measurement precision
If comprehensive log information is analyzed, then measurement precision improves, but the loss of time in processing increases
Solution Approach 1:
The identification unit extracts only the essential process condition information needed for optimization from the comprehensive log information. By selectively identifying and extracting relevant data elements rather than processing all available log data, the system maintains measurement precision while significantly reducing the time required for data processing and analysis.
Data Source
AI summary
An information processing apparatus includes: a registration reception unit that receives a registration of registration information for identifying log information of a desired process step from log information of a substrate processing apparatus that has performed a process including a plurality of steps according to a process condition; an identification unit that identifies the log information of the desired process step from the log information of the substrate processing apparatus, based on the registration information; a process condition acquisition unit that acquires a process condition of the desired process step from the identified log information of the desired process step; an optimization unit that optimizes the process condition of the desired process step, using the acquired process condition of the desired process step, and process result information of the process; and an output unit that outputs the optimized process condition of the desired process step.