Substrate Process Log Analysis for Time-Variable Step Detection
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Solution Overview
Problem
Existing substrate processing apparatuses face frequent operational stops due to abnormality detection, which hampers productivity, and there is a need to identify and address time-variable process steps to enhance operational efficiency.
Innovation Solution
An information processing apparatus that acquires and analyzes process logs to identify time-variable steps by comparing step times across multiple substrate processing apparatuses, facilitating the display of this information for operators to adjust and optimize processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If substrate processing apparatus monitors operational data and detects abnormalities during operation, then operational reliability is improved, but productivity deteriorates due to frequent operational stops
Solution Approach 1:
The system performs preliminary analysis of process logs to identify time-variable steps before abnormalities occur. By pre-identifying steps with high variation in execution time across multiple apparatuses, the system enables operators to take preventive actions before actual abnormalities or operational stops occur, thus maintaining reliability while avoiding productivity loss from frequent stops
2Productivity
If process logs are analyzed to identify time-variable steps, then productivity is improved through optimization, but device complexity increases due to data acquisition and analysis systems
Solution Approach 1:
The information processing apparatus performs multiple functions using a single integrated system: it acquires process logs from multiple substrate processing apparatuses, compares step times across different apparatuses and processes, identifies time-variable steps, and presents analysis results to operators. This multi-functional approach improves productivity through comprehensive analysis while avoiding the complexity of separate specialized systems for each function
Data Source
AI summary
An information processing apparatus including: an acquisition unit that acquires a process log for each execution of the same process including a plurality of process steps in one or more substrate processing apparatuses that execute the process according to a recipe; an analysis unit that compares, based on the process logs, step times taken for the same process step and analyzes a process step having time variation as time-variable step; and a display control unit that displays information related to the time-variable step.