Substrate Magazine Loading Layout for Continuous Package Processing

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Solution Overview

Problem

Existing semiconductor package manufacturing processes face inefficiencies in loading and replacing magazines during various processes, leading to reduced productivity.

Innovation Solution

A substrate loading apparatus with a pickup apparatus capable of moving magazines in multiple directions, an elevator with waiting spaces, and an insert apparatus to transfer substrates, allowing simultaneous loading and magazine replacement, enhancing productivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a substrate loading apparatus loads semiconductor packages into unit process equipment, then the manufacturing process can proceed, but the magazine must be stopped and replaced, causing loss of time and reduced productivity

Engineering Contradiction:

Improvemanufacturing efficiencyVSAvoidmagazine replacement time

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The elevator positions multiple magazines in waiting spaces in advance, so that when one magazine is being used, other magazines are already prepared and positioned for immediate replacement. This preliminary positioning eliminates waiting time during magazine replacement operations.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system enables continuous operation by having the pickup apparatus transfer substrates from a current magazine while the elevator simultaneously prepares the next magazine for replacement. This overlapping of operations ensures that the substrate loading process continues without interruption.

Inventive Principle:

Principle #20Continuity of useful action

2Speed

If the pickup apparatus is positioned close to the elevator and stage for efficient substrate transfer, then transfer speed improves, but the pickup apparatus interferes with magazine replacement operations

Engineering Contradiction:

Improvesubstrate transfer speedVSAvoidmagazine replacement accessibility

Core Design Contradiction:

SpeedVSEase of operation

Solution Approach 1:

The pickup apparatus is positioned in the first direction (horizontal axis) spaced apart from the elevator in the third direction (vertical axis). This spatial arrangement in different dimensions allows the pickup apparatus to maintain efficient substrate transfer positioning while the elevator operates magazine replacement operations in the vertical dimension without interference.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS12525479B2Substrate loading apparatus, semiconductor manufacturing equipment including the same, and method of manufacturing a semiconductor package using the semiconductor manufacturing equipment

Publication Date: 2026.01.13 SAMSUNG ELECTRONICS CO LTD

AI summary

A substrate loading apparatus includes a pickup apparatus configured to move a magazine in a first direction, a second direction and a third direction, an elevator defining a plurality of waiting spaces, a stage configured to support the magazine, and an insert apparatus configured to transfer substrates in the magazine. At least one of the plurality of waiting spaces of the elevator is configured to selectively receive the magazine, and the pickup apparatus is spaced apart from the elevator and the stage in the third direction.