Substrate Processing System Maintenance Timing Control
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Solution Overview
Problem
Existing substrate processing systems face challenges in maintaining productivity and product quality due to the need for maintenance, which often requires temporary production stops and can affect scheduled production amounts and product quality, especially when restoration methods are executed during lot processing.
Innovation Solution
A substrate processing system with a management apparatus that determines the need for maintenance based on operation information, notifies the relevant apparatus, and controls the timing of maintenance processing to avoid production stoppages and minimize product quality effects, by using a host control apparatus to monitor and coordinate maintenance operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If restoration methods (apparatus calibration, reset, processing sequence change, parameter change) are executed to restore apparatus to normal state, then apparatus reliability is improved, but productivity deteriorates due to temporary production stoppage
Solution Approach 1:
The system performs preliminary detection of problem states using multiple indicators (temperature, pressure, vibration, power consumption) and prepares restoration recipes in advance. When a problem is detected, the pre-prepared restoration recipe can be executed immediately without stopping production, as the restoration actions are already planned and ready to be applied during normal operation
Solution Approach 2:
The system changes operational parameters dynamically by adjusting processing conditions through recipe modification. Instead of stopping the apparatus for physical maintenance, the system modifies control parameters (temperature, pressure, flow rates, power consumption levels) to restore optimal operation, allowing continuous production while maintaining reliability
2Reliability
If processing sequence change is executed during lot processing to restore apparatus, then apparatus reliability is improved, but manufacturing precision deteriorates due to processing time variation affecting product quality
Solution Approach 1:
The system dynamically adjusts processing sequences based on real-time apparatus state without fixed rigid schedules. When restoration is needed, the system flexibly modifies the processing sequence timing and order while maintaining overall process integrity, allowing adaptation to current conditions without compromising product quality through uncontrolled time variations
Solution Approach 2:
The system continuously monitors processing time and product quality parameters during restoration operations. Feedback from sensors detects deviations in processing time, and the control system automatically adjusts subsequent processing steps to compensate for variations, ensuring that product quality standards are maintained even when processing sequences are modified for apparatus restoration
Data Source
AI summary
A substrate processing system having a plurality of substrate processing apparatuses, a host control apparatus, and a management apparatus is provided. The management apparatus determines a substrate processing apparatus that needs maintenance processing, based on operation information collected from each of the substrate processing apparatuses, and notifies a determination result to the substrate processing apparatus determined to need the maintenance processing. Each of the substrate processing apparatuses transmits information for executing the maintenance processing to the host control apparatuses upon receiving the determination result. The host control apparatus monitors an operation state of each of the substrate processing apparatuses, and, based on the operation state of the substrate processing apparatus that transmitted the information for executing the maintenance processing, controls a timing of performance of the maintenance processing with respect to the substrate processing apparatus.