Substrate Container Manifold Layout for Humidity and Oxygen Purging
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Solution Overview
Problem
During substrate processing, the introduction of gas through an equipment front end module (EFEM) can increase relative humidity and oxygen levels within the substrate container, interfering with the purging capabilities and creating an undesirable microenvironment.
Innovation Solution
A substrate container with a manifold system that supplies purge gas through multiple inlet ports, including a first stream closer to the front opening and a second stream closer to the rear wall, to distribute and exhaust gas effectively, minimizing ingress and maintaining a controlled environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If gas is introduced through the EFEM during substrate processing, then substrate processing can proceed, but the relative humidity and oxygen levels within the substrate container increase, interfering with purging capabilities
Solution Approach 1:
The purging system is segmented into multiple independent purge gas streams with separate inlet ports positioned at different locations (front, rear, and side walls) of the substrate container. This segmentation allows each stream to target specific regions affected by EFEM gas flow, enabling localized control over humidity and oxygen levels while maintaining substrate processing productivity
Solution Approach 2:
Purge gas is supplied to the substrate container interior before the EFEM gas flow can significantly increase humidity and oxygen levels. The preliminary purging action establishes a controlled atmosphere that resists contamination from subsequent EFEM operations, preventing rather than merely responding to the harmful effect
2Device complexity
If a single purge gas inlet is used, then the system is simple, but the purging effectiveness is reduced due to inability to counteract turbulent gas flows from multiple directions
Solution Approach 1:
The single purge gas source is segmented into multiple distribution outlets positioned at different locations within the substrate container (front inlet port, rear inlet port, and side wall ports). Each outlet directs purge gas toward specific regions where EFEM gas flow creates turbulence, ensuring comprehensive coverage and maintaining purging effectiveness without requiring multiple independent gas sources
Solution Approach 2:
The manifold acts as an intermediary device that receives purge gas from a single source and intelligently distributes it through multiple inlet ports positioned strategically within the substrate container. This intermediary structure enables the system to achieve multi-directional purging capability while maintaining system simplicity, as the manifold translates single-source gas supply into multi-point distribution that counteracts turbulent flows from all directions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The manifold system ensures effective purging by counteracting turbulent gas flows, reducing humidity and oxygen levels, and maintaining a stable microenvironment within the substrate container.
Implementation Method 1
The manifold includes an inlet for receiving purge gas and a gas distributing surface configured to distribute the purge gas within the interior space
Data Source
AI summary
A substrate container includes a shell defining an interior space and a manifold with an inlet and a gas distributing surface. The shell includes a front opening, a bottom wall, and a rear wall. The manifold is attached to the bottom wall and is closer to the front opening than the rear wall. The gas distributing surface is configured to distribute purge gas into the interior space. A method of purging an open substrate container includes supplying a first stream of purge gas to a manifold and supplying a second stream of purge gas to an interior space of the substrate container. The method also including the manifold distributing the purge gas of the first stream within the interior space of the substrate container.