Substrate Processing Liquid Mixing With Pre-Mix Temperature Gating
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Solution Overview
Problem
Substrate processing using a mixed solution, such as Sulfuric acid Hydrogen Peroxide Mixture (SPM), experiences variations in processing results due to temperature fluctuations of the processing liquids before mixing, leading to inconsistent substrate outcomes.
Innovation Solution
A substrate processing apparatus with temperature detection units on the supply routes for the first and second processing liquids, controlled by a controller that ensures the liquids are within an allowable temperature range before mixing, thereby stabilizing the mixed solution temperature and processing results.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If temperature detection and control is implemented before mixing, then manufacturing precision of substrate processing is improved, but device complexity increases due to additional temperature detection units and control mechanisms
Solution Approach 1:
The temperature detection unit measures the temperature of processing liquids before they are mixed, and the controller adjusts the mixing ratio or adds temperature adjustment means to ensure the mixed solution reaches the target temperature. This preliminary temperature check and adjustment prevents temperature variations in the final substrate processing step, improving manufacturing precision without requiring complex real-time temperature control of the entire system.
2Manufacturing precision
If temperature adjustment means is added to the mixed solution supply route, then manufacturing precision is improved, but device complexity and cost increase
Solution Approach 1:
Temperature adjustment means is introduced as an intermediary component in the mixed solution supply route. This device adjusts the temperature of the mixed solution after mixing occurs, serving as a mediator between the mixing process and the substrate processing step. This approach allows temperature control to be implemented at a specific point in the system rather than requiring complex control of all components, thereby improving manufacturing precision while limiting the increase in device complexity.
3Productivity
If mixed solution is supplied immediately after mixing, then productivity is improved, but manufacturing precision deteriorates due to temperature variations
Solution Approach 1:
The temperature detection unit continuously monitors the temperature of processing liquids before mixing, and the controller uses this feedback information to adjust the mixing ratio of first and second processing liquids or activate temperature adjustment means. This closed-loop feedback system ensures the mixed solution reaches the target temperature before being supplied to the substrate, maintaining manufacturing precision while enabling continuous operation for high productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively suppresses variations in the processing results by ensuring the mixed solution is supplied at a consistent temperature, enhancing the reliability and consistency of substrate processing.
Implementation Method 1
a temperature detection unit provided on at least one of the first route and the second route, and that detects temperature of a processing liquid in at least one of the routes
Implementation Method 2
a first opening/closing valve that opens and closes the first route; a second opening/closing valve that opens and closes the second route
Data Source
AI summary
The substrate processing unit processes a substrate, by generating a mixed solution by mixing a first processing liquid and a second processing liquid, and by supplying the mixed solution to the substrate. The first opening/closing valve opens and closes the first route for supplying the first processing liquid. The second opening/closing valve opens and closes the second route that supplies the second processing liquid. The temperature detection unit is provided on at least one of the first route and second route, and detects temperature of the processing liquid. The controller determines whether the temperature of the processing liquid is within an allowable range, before the supply of the mixed solution to the substrate is started. The controller starts supplying the mixed solution to the substrate by opening the first opening/closing valve and the second opening/closing valve, when the temperature of the processing liquid is within the allowable range.