Substrate Processing Module Auto-Configuration for Wafer Chamber Control
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Solution Overview
Problem
Manual configuration of substrate processing apparatuses is time-consuming and prone to human error, lacking an efficient and automated solution for configuring reaction chambers and other processing units.
Innovation Solution
A semiconductor processing apparatus with a control unit comprising processors and memory, capable of reading configuration data files, generating configuration files, enabling/disabling slaves, and loading applications to automatically configure and control process modules, including the use of multiple control units connected in series or parallel to manage and connect pointers and load tables for efficient slave management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual configuration method is used, then configuration can be performed with simple system structure, but configuration time increases and human error occurs
Solution Approach 1:
The system performs self-configuration by automatically reading configuration data files, generating configuration files, and enabling/disabling slaves without human intervention. The control unit executes automated configuration routines that eliminate manual configuration steps, allowing the substrate processing apparatus to configure itself based on pre-stored configuration data.
Solution Approach 2:
Configuration data files are prepared in advance and stored in the control unit's memory before the configuration process begins. These pre-prepared files contain all necessary information about slaves, their statuses, and relationships, enabling the automated configuration process to execute efficiently without real-time human input or complex runtime decision-making.
2Loss of time
If manual configuration is performed, then system structure remains simple, but operational downtime increases
Solution Approach 1:
The manual mechanical configuration process is replaced with an automated electronic control system. The control unit uses software-based configuration file generation and slave management routines to replace manual switching and configuration actions, significantly reducing the time required for configuration operations while maintaining system reliability.
3Reliability
If manual configuration editing is performed, then configuration flexibility is maintained, but human error increases
Solution Approach 1:
The control unit reads configuration data files, generates configuration files, and executes slave enable/disable operations in a standardized automated sequence. This feedback-driven automated process eliminates human error by consistently applying the same configuration logic, while the pre-prepared configuration data files ensure configuration flexibility is maintained through programmable parameters.
Data Source
AI summary
A semiconductor processing apparatus is presented. The apparatus comprising a plurality of process modules, each of them configured to process wafers, and wherein each of the plurality of process modules comprising a plurality of slaves configured to receive and process wafers and a control unit comprising a processor and a memory and the control unit communicably connected to the plurality of slaves in series or in parallel, the control unit configured to configure and control the plurality of slaves, wherein the processor is configured to read at least one configuration data file from the memory, generate at least one configuration file of the status of the plurality of slaves based on the at least one configuration data file, enable/disable the plurality of slaves according to the generated at least one configuration file, and load applications to control the plurality of slaves.