Substrate Processing Nozzle Air-Bubble Capture and Filtration
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Solution Overview
Problem
Conventional substrate processing methods experience increased pressure loss and particle adhesion due to the use of filters with small pore diameters or multiple filters, leading to inefficiencies and increased costs, as well as the generation of air bubbles that carry particles and adhere to substrates.
Innovation Solution
A substrate processing apparatus with an air-bubble capturing part inserted between the first filter and the ejection part, which includes a second filter with a larger pore diameter than the first filter, positioned close to the ejection part to minimize pressure loss and capture air bubbles, thereby reducing particle adhesion to the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a filter with a small pore diameter is provided to remove smaller particles, then particle removal effectiveness is improved, but pressure loss increases
Solution Approach 1:
The patent divides the filtration function into two separate filters with different pore diameters. The first filter (upstream) has a smaller pore diameter for removing smaller particles, while the second filter (downstream) has a larger pore diameter. This segmentation allows each filter to be optimized for its specific function, reducing overall pressure loss while maintaining effective particle removal.
Solution Approach 2:
The patent applies different pore diameters to different locations in the filtration system. The upstream filter uses a smaller pore diameter where high particle removal effectiveness is needed, while the downstream filter uses a larger pore diameter where the processing liquid has already been pressurized, reducing the local pressure loss requirement.
2Manufacturing precision
If multiple filters are provided to improve particle removal, then particle removal effectiveness is improved, but device complexity increases
Solution Approach 1:
The patent changes the pore diameter parameter between the first and second filters. The first filter has a smaller pore diameter for primary filtration, while the second filter has a larger pore diameter for secondary filtration. This parameter change allows multiple filters to work together effectively without requiring identical configurations, simplifying the overall system design.
3Power
If a high-performance pump is used to enable high-pressure liquid transmission, then pressure transmission capability is improved, but equipment size and energy consumption increase
Solution Approach 1:
The patent performs preliminary filtration action using the first filter with smaller pore diameter before the liquid reaches the pump. This removes particles that would otherwise require higher pressure to maintain flow rates, allowing the use of a smaller, more energy-efficient pump while still achieving the required pressure transmission capability.
4Loss of energy
If the size of a filter is increased to reduce pressure loss, then pressure loss is reduced, but mounting position constraints increase
Solution Approach 1:
The patent segments the filtration function into two filters of different sizes and pore diameters. The first filter (smaller, finer pore diameter) is placed upstream where space is available, and the second filter (larger, coarser pore diameter) is placed downstream closer to the pump. This segmentation allows each filter to be sized appropriately for its function while fitting within available mounting spaces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively captures air bubbles and reduces particle adhesion to the substrate by equalizing or reducing pressure loss, minimizing the generation of air bubbles, and optimizing filter design to decrease energy consumption and equipment size.
Implementation Method 1
supply piping having one end connected to a processing-liquid supply part via a first filter... and the first filter removing particles
Implementation Method 2
an air-bubble capturing part that is inserted at a position between the first filter and the ejection part in the supply piping and captures air bubbles contained in the processing liquid
Data Source
AI summary
A technique for reducing the amount of particles adhering to a substrate with a simple structure is provided. A substrate processing apparatus is an apparatus for processing a substrate by ejecting a processing liquid from a nozzle. The substrate processing apparatus includes supply piping and an air-bubble capturing part. One end of the supply piping is connected via a first filter for removing particles to a tank of a processing-liquid supply part that supplies the processing liquid, and the other end of the supply piping is connected to the nozzle. The air-bubble capturing part is inserted at a position between the first filter and the nozzle in the supply piping, and captures air bubbles contained in the processing liquid. Pressure loss caused by the air-bubble capturing part is approximately equal to or smaller than pressure loss caused by the first filter.