Substrate Nozzle Retraction Using a Cup-Mounted Receiving Container
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Solution Overview
Problem
Existing substrate processing apparatuses require cumbersome lowering movements of the nozzle for accommodation, which is undesirable and sometimes impossible without an actuation mechanism for up and down movement.
Innovation Solution
A substrate processing apparatus with a holding mechanism, rotation mechanism, nozzle arm, and cup portion that allows the nozzle to be retracted without lowering, using a first container fixed to the cup portion for accommodation, and a control unit to manage the cup and arm actuation mechanisms for efficient positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the nozzle is inserted into the opening of the container of the standby pod, then the nozzle can be accommodated, but lowering movement of the nozzle is required which is cumbersome and sometimes impossible
Solution Approach 1:
The patent changes the accommodation approach from vertical insertion (requiring lowering movement) to horizontal reception. The container is configured with a receiving portion that horizontally receives the nozzle tip, eliminating the need for vertical lowering movement. This dimensional change resolves the contradiction by making accommodation操作简单 without requiring complex actuation mechanisms.
2Reliability
If the opening of the container is closed through insertion of the nozzle tip, then the processing liquid can be received, but the nozzle must be lowered which increases operation complexity
Solution Approach 1:
Instead of lowering the nozzle into a fixed container opening, the patent inverts the approach by making the container movable. The container is attached to the cup portion and moves together with it, allowing the container to actively approach and receive the nozzle tip horizontally. This inversion eliminates the need for nozzle lowering while ensuring reliable processing liquid reception.
3Ease of operation
If the container is fixed to the cup portion to be movable up and down integrally, then the nozzle can be accommodated at the retracted position without lowering, but the area required may increase
Solution Approach 1:
The patent merges the container with the cup portion by fixing the container to the cup portion so they move up and down integrally. This combination eliminates the need for separate actuation mechanisms and reduces the overall footprint. The merged structure allows the nozzle to be accommodated horizontally at the retracted position without requiring additional vertical space or complex mechanisms.
Data Source
AI summary
A holding mechanism holds a substrate horizontally. A rotation mechanism rotates the holding mechanism holding the substrate. A nozzle supplies a processing liquid to the substrate. A nozzle arm holds the nozzle. An arm actuation mechanism moves the nozzle arm between a processing position overlapping the substrate in plan view and a retracted position displaced from the substrate in plan view. A cup portion is disposed around the holding mechanism, and receives the processing liquid from the substrate. A cup actuation mechanism moves the cup portion up and down between an upper position and a lower position. A first container is fixed to the cup portion to be movable up and down integrally with the cup portion, and can accommodate the nozzle at the retracted position.