Substrate Nozzle Discharge Detection Using Reference Image Comparison
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Solution Overview
Problem
Conventional substrate treating apparatuses face challenges in accurately detecting the discharge of treatment solutions from nozzles due to varying backgrounds caused by different substrate types and treatment details, leading to noise in image capture and inaccurate detection.
Innovation Solution
A substrate treating apparatus and method that utilize a camera to acquire and compare test images and reference images of the substrate surface, ensuring reliable detection of treatment solution discharge independent of substrate type and treatment details by cutting out specific areas for image analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If imaging means directly monitors discharge of treatment solution from nozzle, then discharge detection capability is improved, but measurement precision deteriorates due to varying background reflectance from different substrate types and treatment conditions
Solution Approach 1:
A reference object with known reflectance properties is introduced as an intermediary element in the imaging field. This reference object serves as a stable benchmark against which the reflectance of the substrate and treatment solution can be compared, enabling accurate discharge detection despite variations in substrate type and treatment conditions. The reference object acts as a mediator that decouples the detection system from the variable background conditions.
Solution Approach 2:
The system changes the parameter of reflectance by introducing a reference object with stable and known reflectance characteristics. By comparing the reflectance of the treatment solution against this stable reference, the system can detect discharge accurately regardless of variations in substrate reflectance. This parameter stabilization approach allows reliable measurement despite changing background conditions.
2Productivity
If imaging means monitors treatment process, then treatment monitoring capability is improved, but noise in captured image increases due to varying substrate reflectance from different films and patterns
Solution Approach 1:
The reference object with stable reflectance serves as an intermediary that provides a consistent baseline for image analysis. By comparing treatment areas against this stable reference, the system can distinguish between actual treatment effects and background variations, thereby reducing image noise while maintaining comprehensive treatment monitoring capability.
Solution Approach 2:
The reference object is positioned and configured in advance within the imaging field before treatment begins. This preliminary setup establishes a stable reference baseline that remains constant throughout the treatment process, enabling the system to filter out background noise and focus on actual treatment-related changes in the captured images.
Data Source
AI summary
An upper treatment solution nozzle discharges a treatment solution at a treatment position above a substrate. A reference image and a test image are cut out from an image captured after the upper treatment solution nozzle receives an instruction to start discharging the treatment solution. The test image is an image including an area of a surface of a substrate, in which a liquid flow of the treatment solution from the upper treatment solution nozzle is to be formed. The reference image is an image of an area of the surface of the substrate except for the area in which the liquid flow of the treatment solution from the upper treatment solution nozzle is to be formed. Through the comparison between the reference image and the test image, a discharge of the treatment solution from the upper treatment solution nozzle is determined.