Substrate Processing Nozzle Ejection Checking via Intermediary Jig

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Solution Overview

Problem

Existing substrate processing systems face challenges in ensuring the ejection of processing liquids from nozzles is properly checked without enlarging the apparatus, particularly when users, especially unskilled ones, may accidentally eject liquids to unintended places during the installation of a checking jig.

Innovation Solution

A substrate processing system that includes a nozzle for ejecting processing liquids, a checking jig with a liquid receiving unit to check the ejection state, a jig sensor to detect the jig's position, and a controller that prohibits ejection unless the jig is correctly installed, allowing for a mode transition from maintenance to ejection checking mode.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a checking jig is installed in the processing chamber to verify nozzle ejection, then ejection checking capability is improved, but device complexity and apparatus size increase

Engineering Contradiction:

Improveejection checking capabilityVSAvoidapparatus structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

A checking jig is introduced as an intermediary component that can be temporarily installed in the processing chamber to verify nozzle ejection functionality. The jig includes liquid receiving portions positioned at specific locations to capture and indicate proper ejection from each nozzle, allowing reliable checking without permanently modifying the apparatus structure.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The checking jig is divided into multiple independent liquid receiving portions, each corresponding to a specific nozzle ejection point. This segmentation allows individual verification of each nozzle's ejection capability while maintaining a compact, modular jig structure that can be easily installed and removed.

Inventive Principle:

Principle #1Segmentation

2Ease of operation

If ejection checking is performed during maintenance mode, then operational flexibility is improved, but risk of liquid misdirection increases

Engineering Contradiction:

Improveoperational flexibilityVSAvoidliquid misdirection risk

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The system requires the checking jig to be properly installed in the processing chamber before enabling ejection during maintenance mode. The control unit verifies jig installation through a detection unit, and only after confirmation does it permit ejection. This preliminary action ensures that liquid will be properly directed to the checking jig rather than misdirected to unintended locations.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The control unit continuously monitors the installation state of the checking jig via a detection unit and provides feedback control on ejection permission. When the jig is properly installed, the system enables ejection for checking; when removed or improperly installed, ejection is automatically prohibited. This feedback mechanism prevents liquid misdirection by ensuring the receiving portion is in place before and during ejection.

Inventive Principle:

Principle #23Feedback

3Adaptability or versatility

If the processing chamber is used for both substrate processing and ejection checking, then device versatility is improved, but contamination risk increases

Engineering Contradiction:

Improvemulti-functionalityVSAvoidcontamination risk

Core Design Contradiction:

Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The ejection checking function is extracted as a separate, temporary operation using a removable checking jig rather than being integrated into the permanent substrate processing setup. The jig can be installed when checking is needed and removed afterward, allowing the processing chamber to serve both substrate processing and ejection checking purposes without permanent modification or increased contamination risk.

Inventive Principle:

Principle #2Taking out (Extraction)

Data Source

PatentUS9782807B2Substrate processing system, method for controlling substrate processing system, and storage medium

Publication Date: 2017.10.10 TOKYO ELECTRON LTD

AI summary

Disclosed is a substrate processing system including a substrate processing apparatus that includes a nozzle configured to eject a processing liquid to a substrate. The system includes a jig sensor configured to detect whether a checking jig provided with a liquid receiving unit receiving the processing liquid ejected from the nozzle and configured to check an ejection state of the processing liquid from the nozzle is installed at a predetermined position of the substrate processing apparatus; and a controller configured to control the ejection of the processing liquid from the nozzle. When it is determined that the checking jig is installed at the predetermined position of the substrate processing apparatus based on detection of the jig sensor in a state where the ejection of the processing liquid from the nozzle is prohibited, the controller permits the ejection of the processing liquid from the nozzle.