Substrate Processing Nozzle Flow Timing Control
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Solution Overview
Problem
Existing substrate processing apparatuses fail to consistently control the time during which processing fluid is in contact with the substrate, leading to variations in processing results due to manufacturing errors or aging, which affects the flow rate monitoring and supply timing.
Innovation Solution
A processing apparatus with a chamber, nozzle, measuring unit, and controller that monitors and adjusts the flow rate and timing of processing fluid supply to ensure consistent contact time across multiple nozzles, using a reference nozzle to synchronize the reaching timing of processing fluid to the substrate surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If processing liquid supply control is performed based on flowmeter measurement to enable stable supply at specific flow rate, then flow rate stability is improved, but manufacturing errors and aging still cause variations in fluid reaching timing
Solution Approach 1:
The system introduces a feedback mechanism where the actual supply flow rate measured by the flowmeter is used to calculate the integrated amount of processing liquid supplied. This feedback loop enables the controller to adjust the opening/closing timing dynamically, compensating for manufacturing errors and aging effects that cause variations in fluid reaching timing between different nozzles and processing units.
Solution Approach 2:
Each processing unit independently calculates its own integrated amount of processing liquid supplied based on its own flowmeter measurements. This self-service approach allows each nozzle to autonomously determine and adjust its opening/closing timing, eliminating the need for complex centralized coordination and ensuring consistent fluid reaching timing across all processing units despite manufacturing variations.
2Ease of operation
If opening/closing operation timing is set at preset timing, then control simplicity is improved, but variations in processing results occur due to inconsistent fluid contact time
Solution Approach 1:
The system transitions from static preset timing to dynamic timing adjustment. The opening/closing timing is no longer fixed but is dynamically determined based on real-time flow rate measurements and integrated amount calculations. This dynamic approach maintains control simplicity while achieving consistent fluid contact time across all processing units, as the timing automatically adapts to actual supply conditions.
Solution Approach 2:
The system changes the timing parameter from a fixed preset value to a variable determined by flow rate integration. By calculating the integrated amount of processing liquid supplied and using this to determine opening/closing timing, the system achieves consistent processing results while maintaining ease of operation through automated parameter adjustment based on measured conditions.
3Measurement precision
If flow rate monitoring is implemented, then supply control accuracy is improved, but additional measurement and calculation complexity is introduced
Solution Approach 1:
Each processing unit independently performs flow rate measurement, integrated amount calculation, and timing adjustment without requiring complex centralized measurement systems. This self-service approach achieves high supply control accuracy while minimizing system complexity, as each unit only needs its own flowmeter and control logic rather than a complex networked measurement system.
Solution Approach 2:
The measurement and control system is segmented into independent processing units, each with its own flowmeter and control logic. This segmentation reduces overall system complexity by avoiding the need for a centralized complex measurement system, while still achieving high supply control accuracy through distributed independent measurement and adjustment.
Data Source
AI summary
Disclosed is a processing apparatus including a chamber, at least one nozzle, a measuring unit, an opening/closing unit, and a controller. The chamber accommodates a workpiece therein. The nozzle is provided in the chamber to supply a processing fluid toward the workpiece. The measuring unit measures a supply flow rate of the processing fluid supplied to the nozzle. The opening/closing unit performs opening/closing of a flow path of the processing fluid to be supplied to the nozzle. The controller outputs opening and closing operation signals at a preset timing. After outputting the opening operation signal, the controller calculates an integrated amount of the processing fluid based on a measurement result of the measuring unit, and performs an output timing change processing to change a timing of outputting the opening or closing operation signal from the preset timing based on the calculated integrated amount.