Substrate Processing Nozzle Pipe Handling and Deformation Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses face challenges in improving handleability of pipes connected to nozzles, reducing particle generation, and extending the lifetime of these pipes due to their high degree of freedom in movement.
Innovation Solution
A substrate processing apparatus is designed with a substrate holder, multiple nozzles for supplying processing liquids, flexible liquid pipes, a support structure, a containing member, and a nozzle driver. The containing member encloses the nozzles and the first portions of the liquid pipes, enhancing handleability and limiting the deformation range of the pipes during movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the pipes are made flexible to allow free movement of the nozzles, then the adaptability of the nozzle positioning is improved, but the handleability of the pipes deteriorates and particle generation increases
Solution Approach 1:
The pipe system is divided into multiple segments: rigid pipes for stable positioning, flexible pipes for movement compensation, and support structures for guidance. This segmentation allows each part to perform its specific function optimally without compromising the other.
Solution Approach 2:
A support structure acts as an intermediary element between the rigid pipe system and the flexible pipe system. This support structure guides and constrains the flexible pipes during nozzle movement, preventing random deformation while allowing necessary motion freedom.
2Adaptability or versatility
If the pipes are allowed high degree of freedom in movement, then the adaptability to nozzle positioning is improved, but the lifetime of the pipes shortens due to contact and rubbing
Solution Approach 1:
The pipe system is divided into rigid and flexible sections, with the rigid sections providing structural stability and the flexible sections accommodating movement. This segmentation prevents excessive deformation and contact between pipes during nozzle positioning adjustments.
Solution Approach 2:
The support structure serves as a mediator that guides the flexible pipes during movement, preventing them from contacting each other or rubbing against surrounding components. This guidance mechanism extends pipe lifetime while maintaining positioning freedom.
3Adaptability or versatility
If the pipes are made flexible to accommodate nozzle movement, then the adaptability is improved, but the particles generated by pipe deformation increase
Solution Approach 1:
The pipe system uses rigid pipes for stable sections and flexible pipes only where movement is required. This segmentation minimizes the overall flexible pipe length, reducing the source of particle generation while maintaining necessary adaptability.
Solution Approach 2:
The support structure acts as a constraint that limits the deformation range of flexible pipes. By guiding pipe movement within defined boundaries, the support structure prevents excessive deformation that would generate particles, while still allowing necessary nozzle movement.
Data Source
AI summary
A development device has a plurality of nozzles and a plurality of pipes. The plurality of nozzles supply a processing liquid to a substrate. Each of the plurality of pipes is connected to one of the plurality of nozzles and supplies a processing liquid to a nozzle to which the pipe is connected. The development device includes a support and a cover member. The support supports portions of the plurality of pipes. The cover member contains part of the plurality of nozzles and the plurality of pipes while allowing supply of the processing liquid to substrates from the plurality of nozzles. When the support moves or rotates, the plurality of nozzles move between a processing position and a waiting position.